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F. Jiang, Duan, N., Lin, H., Li, L., Hu, J., Bi, L., Lu, H., Weng, X., Xie, J., and Deng, L., ZrO2-TiO2 thin films and resonators for mid-infrared integrated photonics, Integrated Optics: Devices, Materials, and Technologies Xviii, vol. 8988, 2014.