SEM
The SEM is in 4-141. Contact Don Galler.
JEOL 6610LV Low Vacuum Scanning Electron Microscope
- Fundamental operating modes: High vacuum, Low Vacuum
- Maximum magnification: 300,000
- Accelerating voltage: 300 V to 30 kV
- Chamber size: 30cm x 30 cm x 30 cm
- Stage motion: X and Y: ± 5cm from center, Z: 0-8 cm from lowest position
- Image resolution: 1–20 MPixels
- 2 visible light cameras: sample holder view, static image for sample navigation
- IXRF EDS system: spectrum, image, xray map, line scan
- Detectors
- Backscatter with composition, topography, shadow modes (HV/LV)
- High vacuum secondary (HV)
- Low vacuum secondary (LV)
- Xray – 30 mm2 Silicon Drift Detector (HV/LV)
- Low Vacuum operating mode
- image non-conductive samples directly without coating
- pressure range: 10-270 Pa
- Low vacuum secondary detector
- Deformation stage for tension/compression testing with 200 N capacity
- 15 point electrical vacuum/airside feed through connectors
- Electron flight simulator program for assessing excitation volume issues
- Active magnetic field cancelling system