SEM

The SEM is in 4-141. Contact Don Galler.

JEOL 6610LV Low Vacuum Scanning Electron Microscope

  • Fundamental operating modes: High vacuum, Low Vacuum
  • Maximum magnification: 300,000
  • Accelerating voltage: 300 V to 30 kV
  • Chamber size: 30cm x 30 cm x 30 cm
  • Stage motion: X and Y: ± 5cm from center, Z: 0-8 cm from lowest position
  • Image resolution: 1–20 MPixels
  • 2 visible light cameras: sample holder view, static image for sample navigation
  • IXRF EDS system: spectrum, image, xray map, line scan
  • Detectors
    • Backscatter with composition, topography, shadow modes (HV/LV)
    • High vacuum secondary (HV)
    • Low vacuum secondary  (LV)
    • Xray – 30 mm2 Silicon Drift Detector (HV/LV)
  • Low Vacuum operating mode
    • image non-conductive samples directly without coating
    • pressure range: 10-270 Pa
    • Low vacuum secondary detector
  • Deformation stage for tension/compression testing with 200 N capacity
  • 15 point electrical vacuum/airside feed through connectors
  • Electron flight simulator program for assessing excitation volume issues
  • Active magnetic field cancelling system