MEMS (Micro-Electro-Mechanical Systems)

Micro-Electro-Mechanical Systems, or MEMS, are miniaturized mechanical or electro-mechanical devices and structures.

Researchers

Klavs F. Jensen

Warren K. Lewis Professor of Chemical Engineering; Professor of Materials Science and Engineering

Materials Chemistry; MEMS (Micro-Electro-Mechanical Systems); Nanotechnology; Surfaces, Interfaces, and Thin Films; Transport Phenomena

Carl V. Thompson

Stavros Salapatas Professor of Materials Science and Engineering; Director, Materials Research Laboratory (MRL) at MIT

Electrochemistry; Electronic Materials; Energy Storage; Mechanical Behavior of Materials; MEMS (Micro-Electro-Mechanical Systems); Nanotechnology; Surfaces, Interfaces, and Thin Films

Harry L. Tuller

R.P. Simmons Professor of Ceramics and Electronic Materials

Ceramics; Electrochemistry; Electronic Materials; Energy; Environment; Materials Processing; Materials Chemistry; MEMS (Micro-Electro-Mechanical Systems); Nanotechnology; Photonic Materials; Semiconductors; Surfaces, Interfaces, and Thin Films; Thermodynamics; Transport Phenomena