Low-loss photonic device in Ge-Sb-S chalcogenide glass

TitleLow-loss photonic device in Ge-Sb-S chalcogenide glass
Publication TypeJournal Article
Year of Publication2016
AuthorsDu, Q, Huang, Y, Li, J, Kita, D, Michon, J, Lin, H, Li, L, Novak, S, Richardson, K, Zhang, W, Hu, J
JournalOptics Letters
Pagination3090 - 3093
Date Published2016/07/01/
ISBN Number0146-9592
Keywordsfabrication, films, optical wave-guides, ring resonators, silicon

Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge23Sb7S70 chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (Q-factor) of 1.2 x 10(6) were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices. (C) 2016 Optical Society of America

Short TitleOpt. Lett.