Crystallisation of Foturan® glass–ceramics

TitleCrystallisation of Foturan® glass–ceramics
Publication TypeJournal Article
Year of Publication2012
AuthorsEvans, A, Rupp, JLM, Gauckler, LJ
JournalJournal of the European Ceramic Society
Volume32
Issue1
Pagination203 - 210
Date Published2012/01//
Abstract

Photostructurable glass-ceramics are suitable for 3-dimensional microfabrication and, in some instances, can be used as an alternative material to silicon in the microfabrication of micro-electro-mechanical-system (MEMS) devices. Foturan (R) is a photosensitive lithium-aluminium-silicate glass that can be structured by an exposure to UV light, followed by a thermal treatment and an etching step. In this work, the crystallisation kinetics and microstructure evolution of unexposed and UV-exposed Foturan (R) are investigated by means of differential scanning calorimetry, X-ray diffraction and scanning electron microscopy. The glass transition temperature T(g), the apparent activation energy of crystallisation E(a) and the colour of UV-exposed Foturan (R) are discussed. It is shown that nucleation and crystallisation of UV-exposed Foturan (R) can be steered either as a function of temperature (non-isothermal) or as a function of time (isothermal). This is essential for the photostructuring and etching of Foturan (R) regarding the achievable feature sizes of 25 mu m for MEMS applications. (C) 2011 Elsevier Ltd. All rights reserved.