Lionel C. Kimerling

  • Thomas Lord Professor of Materials Science and Engineering
  • SB Metallurgy, MIT, 1965
  • PhD Metallurgy, MIT, 1969

Electronic Materials; Nanotechnology; Photonic Materials

Lionel C. Kimerling

Research

Prof. Kimerling's research activities address the fundamental science of imperfection in solids and the processing of electronic materials. All his programs include an emphasis on both materials science and applications. His MIT research on silicon processing has addressed photovoltaic cells environmentally benign integrated circuit manufacturing. Among the achievements of this research are the creation of a process simulator for wafer contamination gettering; development of a new ultrasensitive measurement for silicon surface perfection; the discovery of a surface passivation method for the reduction of cleaning steps in manufacturing; and the development of in-situ diagnostic tools for wet chemical process control. His group’s Microphotonics research has produced a series of first ever achievements with the goal of monolithic integration of optical interconnection with integrated microelectronic circuit chips. The research has developed submicron dimensioned optical structures by employing materials systems with high refractive index contrast for confining light. His research results in this area include the optoelectronic physics and materials processing of rare earth-doped semiconductors culminating in the first room temperature operational, erbium-doped silicon light emitting diode; the monolithic integration of MOSFET driver circuitry with Si:Er LEDs and Si/SiO2 waveguides; the process development silicon optical waveguides to yield low loss microphotonic signal distribution; the fabrication and demonstration of the first waveguide-integrated microcavity resonators based on photonic crystal designs at a wavelength of 1.54 microns; the fabrication and demonstration of optical add/drop microphotonic circuits for high capacity WDM data distribution based on microring resonator filter junctions; and the process development and testing of high performance, heteroepitaxial Ge-on-Si photodetectors for microphotonic applications.

Recent News

Greater Springfield could be home to future laser industry

Last month, STCC announced that it is working with MIT on proposing a state-of-the-art photonics "factory" on STCC's campus in Springfield. MIT launched the first Photonics Education and Practice Factory this past spring, and Quinsigamond Community College and Worcester Polytechnic Institute --…   more

Roadmapping integrated photonics

AIM Photonics Institute, the MIT Microphotonics Center and iNEMI co-host the Spring meeting on the Integrated Photonics System Roadmap [IPSR], Tuesday through Thursday, March 28-30, 2017, at MIT. Session topics include Silicon Photonics and Moore’s Law; Human-Machine Interfaces; Automated…   more

Chemical Sensing on a Chip

Anuradha Agarwal is working with Lionel Kimerling and Juejun Hu of MIT's DMSE in the pursuit of shrinking and advancing sensory technology.  …   more

Research and Education Initiatives, 2015-16

Here's a quick video update on research and education initiatives from DMSE. Professor Chiang offers his perspective on energy research, Professor Gibson describes DMSE's online educational offerings, Professor Fitzgerald explains DMSE's international collaboration with universities in…   more

Silicon photonics meets the foundry

Advances in microprocessors have transferred the computation bottleneck away from CPUs to better communications between components. That trend is driving the advance into optical interconnection of components, now moving from systems to boards to chip packages to chips themselves. Lionel…   more

Publications

2018

L. He et al., “Broadband athermal waveguides and resonators for datacom and telecom applications”, Photonics Research, vol. 6. p. 987, 2018.
L. Kimerling et al., “High gain optical parametric amplification in ultra-silicon-rich nitride (USRN) waveguides”, in Nonlinear Optics and its Applications 2018, Strasbourg, France, 2018, p. 5.
B. -U. Sohn, Monmeyran, C., Kimerling, L., Agarwal, A., and Tan, D. T. H., “Nonlinear optical properties of germanium at mid-infrared wavelengths (Conference Presentation)”, in Nonlinear Optics and its Applications 2018, Strasbourg, France, 2018, p. 2.
J. Wang et al., “Robust cavity soliton formation with hybrid dispersion”, Photonics Research, vol. 6. p. 647, 2018.
M. Glick, Rastegarfar, H., Pfahl, R. C., and Kimerling, L. C., “Transceiver Scaling and the IPSR-I Roadmap”, in 2018 20th International Conference on Transparent Optical Networks (ICTON), Bucharest, 2018, pp. 1-4.
L. Zhang et al., “Towards on-chip spectroscopy based on a single microresonator”, in 2017 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices, Beijing, China, 2018, p. 59.
Y. Guo et al., “Two-octave dispersion flattening with five zero-dispersion wavelengths in the mid-IR”, in Photonic and Phononic Properties of Engineered Nanostructures VIII, San Francisco, United States, 2018, p. 88.
L. He et al., “Broadband athermal waveguides and devices for datacom and telecom applications”, in Silicon Photonics XIII, San Francisco, United States, 2018, p. 64.
R. Singh, Su, P., Kimerling, L., Agarwal, A., and Anthony, B. W., “Towards on-chip mid infrared photonic aerosol spectroscopy”, Applied Physics Letters, vol. 113. p. 231107, 2018.
Y. Guo et al., “Power-efficient generation of two-octave mid-IR frequency combs in a germanium microresonator”, Nanophotonics, vol. 7. pp. 1461-1467, 2018.
C. Monmeyran et al., “Improved retention of phosphorus donors in germanium using a non-amorphizing fluorine co-implantation technique”, Journal of Applied Physics, vol. 123. p. 161524, 2018.
H. Lin et al., “Mid-infrared integrated photonics on silicon: a perspective”, Nanophotonics, vol. 7. pp. 393-420, 2018.

2017

L. He et al., “Loss reduction of silicon-on-insulator waveguides for deep mid-infrared applications”, Optics Letters, vol. 42. p. 3454, 2017.
L. Zhang, Tian, H., Liu, H., Li, G., Kimerling, L., and Michel, J., “Multipath Trapping Dynamics of Nanoparticles towards an Integrated Silicon Slot Waveguide”, in Proceedings of The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, 2017, p. 4407.
M. Yang et al., “Mid-IR supercontinuum generated in low-dispersion Ge-on-Si waveguides pumped by sub-ps pulses”, Optics Express, vol. 25. p. 16116, 2017.
J. W. Choi et al., “Nonlinear optical properties of GeSbS chalcogenide waveguides”, in 2017 Opto-Electronics and Communications Conference (OECC) and Photonics Global Conference (PGC), Singapore, 2017, pp. 1-2.
H. Tian, Kimerling, L. C., Michel, J., Li, G., and Zhang, L., “Multipath trapping dynamics of nanoparticles towards an integrated waveguide with a high index contrast”, San Francisco, California, United States, 2017, p. 100610P.
J. Wang et al., “Robust generation of frequency combs in a microresonator with strong and narrowband loss”, Photonics Research, vol. 5. p. 552, 2017.
H. Lin et al., “Mid-infrared integrated photonics on silicon: a perspective”, Nanophotonics, vol. 7. 2017.
J. Wang et al., “Robust generation of frequency combs in a microresonator with strong and narrowband loss”, Photonics Research, vol. 5. pp. 552-556, 2017.
L. He et al., “Loss reduction of silicon-on-insulator waveguides for deep mid-infrared applications”, Optics Letters, vol. 42. pp. 3454-3457, 2017.
B. -U. Sohn, Monmeyran, C., Kimerling, L. C., Agarwal, A. M., and Tan, D. T. H., “Kerr nonlinearity and multi-photon absorption in germanium at mid-infrared wavelengths”, Applied Physics Letters, vol. 111. p. 091902, 2017.
M. Yang et al., “Mid-IR supercontinuum generated in low-dispersion Ge-on-Si waveguides pumped by sub-ps pulses”, Optics Express, vol. 25. pp. 16116-16122, 2017.
K. J. A. Ooi et al., “Pushing the limits of CMOS optical parametric amplifiers with USRN:Si7N3 above the two-photon absorption edge”, Nature Communications, vol. 8. p. 13878, 2017.
C. Monmeyran, Crowe, I. F., Gwilliam, R. M., Michel, J., Kimerling, L. C., and Agarwal, A. M., “Strategies for increased donor electrical activity in germanium (opto-) electronic materials: a review”, International Materials Reviews, vol. 62. pp. 334-347, 2017.
H. Tian, Kimerling, L. C., Michel, J., Li, G., and Zhang, L., “Multipath Trapping Dynamics of Nanoparticles towards an Integrated Waveguide with a High Index Contrast”, in Microfluidics, Biomems, and Medical Microsystems Xv, vol. 10061, Bellingham: Spie-Int Soc Optical Engineering, 2017, p. UNSP - 100610P.
H. Tian, Kimerling, L. C., Michel, J., Li, G., and Zhang, L., “Dynamics of Nanoparticles Trapped on an Integrated Slot Waveguide with a High Index Contrast”, in Optics in the Life Sciences Congress, San Diego, California, 2017, p. OtS1D.4.

2016

J. W. Choi et al., “Nonlinear characterization of GeSbS chalcogenide glass waveguides”, Scientific Reports, vol. 6. p. 39234, 2016.
C. Monmeyran et al., “Annealing bounds to prevent further Charge Transfer Inefficiency increase of the Chandra X-ray CCDs”, Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, vol. 389. pp. 23-27, 2016.
N. Borodinov et al., “Gradient Polymer Nanofoams for Encrypted Recording of Chemical Events”, Acs Nano, vol. 10. pp. 10716-10725, 2016.
Y. Guo et al., “Bilayer dispersion-flattened waveguides with four zero-dispersion wavelengths”, Optics Letters, vol. 41. pp. 4939-4942, 2016.
P. T. Lin et al., “Label-Free Glucose Sensing Using Chip-Scale Mid-Infrared Integrated Photonics”, Advanced Optical Materials, vol. 4. pp. 1755-1759, 2016.
Z. Han et al., “On-chip chalcogenide glass waveguide-integrated mid-infrared PbTe detectors”, Applied Physics Letters, vol. 109. p. 071111, 2016.
Z. Jafari, Zhang, L., Agarwal, A. M., Kimerling, L. C., Michel, J., and Zarifkar, A., “Parameter Space Exploration in Dispersion Engineering of Multilayer Silicon Waveguides from Near-Infrared to Mid-Infrared”, Journal of Lightwave Technology, vol. 34. pp. 3696-3702, 2016.
C. Bao et al., “Effect of a breather soliton in Kerr frequency combs on optical communication systems”, Optics Letters, vol. 41. pp. 1764-1767, 2016.
J. Wang et al., “Robust Generation of Kerr Frequency Combs with Strong and Localized Spectral Loss”, in 2016 Ieee 13th International Conference on Group Iv Photonics (gfp), New York: Ieee, 2016, pp. 153-154.
C. Alonso-Ramos et al., “Subwavelength engineered fiber-to-chip silicon-on-sapphire interconnects for mid-infrared applications”, in Silicon Photonics and Photonic Integrated Circuits V, vol. 9891, Bellingham: Spie-Int Soc Optical Engineering, 2016, p. UNSP - 98911J.
D. Ma et al., “SiC-on-insulator on-chip photonic sensor in a radiative environment”, in 2016 Ieee Sensors, New York: Ieee, 2016.
B. S. Pearson, Kimerling, L. C., and Michel, J., “Germanium Photodetectors on Amorphous Substrates for Electronic-Photonic Integration”, in 2016 Ieee 13th International Conference on Group Iv Photonics (gfp), New York: Ieee, 2016, pp. 20-21.
P. Su et al., “Irradiation of on-chip chalcogenide glass waveguide mid-infrared gas sensor”, in 2016 Ieee Sensors, New York: Ieee, 2016.
L. He et al., “Low-loss SOI Waveguides at Mid-IR Wavelengths (4800 nm) Using the Second-order TE Mode”, in 2016 Ieee 13th International Conference on Group Iv Photonics (gfp), New York: Ieee, 2016, pp. 158-159.
M. Yang et al., “Mid-infrared Supercontinuum Generation in a Low-dispersion Ge-on-Si Waveguide Using Sub-picosecond Pulses”, in 2016 Ieee 13th International Conference on Group Iv Photonics (gfp), New York: Ieee, 2016, pp. 36-37.
Y. Guo et al., “Mid-IR Kerr Frequency Comb Generation from 4000 to 10000 nm in a CMOS-compatible Germanium Microcavity”, in 2016 Conference on Lasers and Electro-Optics (cleo), New York: Ieee, 2016.
H. Lin et al., On-chip Infrared Spectroscopic Sensing: Redefining the Benefits of Scaling. New York: Ieee, 2016.

2015

N. S. Patel, Monmeyran, C., Agarwal, A. M., and Kimerling, L. C., “Point defect states in Sb-doped germanium”, Journal of Applied Physics, vol. 118. p. 155702, 2015.
C. Bao, Zhang, L., Kimerling, L. C., Michel, J., and Yang, C., “Soliton breathing induced by Stimulated Raman scattering and self-steepening in octave-spanning Kerr frequency comb generation”, Optics Express, vol. 23. pp. 18665-18670, 2015.
P. T. Lin et al., “Label-Free Water Sensors Using Hybrid Polymer-Dielectric Mid-Infrared Optical Waveguides”, Acs Applied Materials & Interfaces, vol. 7. pp. 11189-11194, 2015.
L. Z. Broderick, Albert, B. R., Pearson, B. S., Kimerling, L. C., and Michel, J., “Design for energy: Modeling of spectrum, temperature and device structure dependences of solar cell energy production”, Solar Energy Materials and Solar Cells, vol. 136. pp. 48-63, 2015.
D. T. H. Tan, Agarwal, A. M., and Kimerling, L. C., “Nonlinear photonic waveguides for on-chip optical pulse compression”, Laser & Photonics Reviews, vol. 9. pp. 294-308, 2015.
Z. Han, Zhang, L., Kimerling, L. C., and Agarwal, A. M., “Integrated Midinfrared Laser Based on an Er-Doped Chalcogenide Microresonator”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 21. p. 1603007, 2015.
Z. Han, Zhang, L., Kimerling, L. C., and Agarwal, A. M., “Integrated Midinfrared Laser Based on an Er-Doped Chalcogenide Microresonator”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 21. 2015.
C. Bao et al., “Increased bandwidth with flattened and low dispersion in a horizontal double-slot silicon waveguide”, Journal of the Optical Society of America B-Optical Physics, vol. 32. pp. 26-30, 2015.
C. Bao et al., “Increased bandwidth with flattened and low dispersion in a horizontal double-slot silicon waveguide”, Journal of the Optical Society of America B-Optical Physics, vol. 32. pp. 26-30, 2015.

2014

C. Bao et al., “Nonlinear conversion efficiency in Kerr frequency comb generation”, Optics Letters, vol. 39. pp. 6126-6129, 2014.
T. Goto et al., “Nonreciprocal racetrack resonator based on vacuum-annealed magnetooptical cerium-substituted yttrium iron garnet”, Optics Express, vol. 22. 2014.
L. Zhang, Agarwal, A. M., Kimerling, L. C., and Michel, J., “Nonlinear Group IV photonics based on silicon and germanium: from near-infrared to mid-infrared”, Nanophotonics, vol. 3. pp. 247-268, 2014.
L. C. Kimerling, Kwong, D. -L., and Wada, K., “Scaling computation with silicon photonics”, Mrs Bulletin, vol. 39. pp. 687-695, 2014.
A. P. Soliani et al., “Gradient films from shape memory nanofoams for unattended sensing”, Abstracts of Papers of the American Chemical Society, vol. 247. 2014.
X. Sheng, Broderick, L. Z., and Kimerling, L. C., “Photonic crystal structures for light trapping in thin-film Si solar cells: Modeling, process and optimizations”, Optics Communications, vol. 314. pp. 41-47, 2014.
Y. Zha, Lin, P. T., Kimerling, L. C., Agarwal, A. M., and Arnold, C. B., “Inverted-Rib Chalcogenide Waveguides by Solution Process”, Acs Photonics, vol. 1. pp. 153-157, 2014.
P. T. Lin, Jung, H., Kimerling, L. C., Agarwal, A. M., and Tang, H. X., “Low-loss aluminium nitride thin film for mid-infrared microphotonics”, Laser & Photonics Reviews, vol. 8. pp. L23 - L28, 2014.
V. Singh et al., “Mid-infrared materials and devices on a Si platform for optical sensing”, Science and Technology of Advanced Materials, vol. 15. 2014.
J. Mu, Soref, R., Kimerling, L. C., and Michel, J., “Silicon-on-nitride structures for mid-infrared gap-plasmon waveguiding”, Applied Physics Letters, vol. 104. 2014.
P. T. Lin et al., “Mid-Infrared Spectrometer Using Opto-Nanofluidic Slot-Waveguide for Label-Free On-Chip Chemical Sensing”, Nano Letters, vol. 14. pp. 231-238, 2014.
L. Zhang, Agarwal, A. M., Kimerling, L. C., and Michel, J., “Two-cycle pulse generation from mode-locked Kerr frequency combs based on an integrated dispersion-flattened micro-resonator”, Laser Resonators, Microresonators, and Beam Control Xvi, vol. 8960. 2014.
Y. Cai, Yu, W., Kimerling, L. C., and Michel, J., “Chemical Mechanical Polishing of Selective Epitaxial Grown Germanium on Silicon”, Ecs Journal of Solid State Science and Technology, vol. 3. pp. P5 - P9, 2014.

2013

S. Grillanda et al., “Post-fabrication trimming of athermal silicon waveguides”, Optics Letters, vol. 38. pp. 5450-5453, 2013.
L. Zhang et al., “Generation of two-cycle pulses and octave-spanning frequency combs in a dispersion-flattened micro-resonator”, Optics Letters, vol. 38. pp. 5122-5125, 2013.
J. P. Singer, Lin, P. -T., Kooi, S. E., Kimerling, L. C., Michel, J., and Thomas, E. L., “Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient”, Advanced Materials, vol. 25. pp. 6100-6105, 2013.
P. T. Lin, Singh, V., Lin, H. -Y. G., Tiwald, T., Kimerling, L. C., and Agarwal, A. M., “Low-Stress Silicon Nitride Platform for Mid-Infrared Broadband and Monolithically Integrated Microphotonics”, Advanced Optical Materials, vol. 1. pp. 732-739, 2013.
J. Mu, Chen, L., Li, X., Huang, W. -P., Kimerling, L. C., and Michel, J., “Hybrid nano ridge plasmonic polaritons waveguides”, Applied Physics Letters, vol. 103. 2013.
P. T. Lin et al., “Si-CMOS compatible materials and devices for mid-IR microphotonics”, Optical Materials Express, vol. 3. pp. 1474-1487, 2013.
Y. Cai et al., “Analysis of Threshold Current Behavior for Bulk and Quantum-Well Germanium Laser Structures”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 19. 2013.
V. Singh et al., “Evanescently coupled mid-infrared photodetector for integrated sensing applications: Theory and design”, Sensors and Actuators B-Chemical, vol. 185. pp. 195-200, 2013.
J. Mu et al., “Towards ultra-subwavelength optical latches”, Applied Physics Letters, vol. 103. 2013.
P. T. Lin, Singh, V., Kimerling, L. C., and Agarwal, A. M., “Planar silicon nitride mid-infrared devices”, Applied Physics Letters, vol. 102. 2013.
J. Mu et al., “Design and fabrication of a high transmissivity metal-dielectric ultraviolet band-pass filter”, Applied Physics Letters, vol. 102. 2013.
H. Lin et al., “Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators”, Optics Letters, vol. 38. pp. 1470-1472, 2013.
R. Camacho-Aguilera, Han, Z., Cai, Y., Kimerling, L. C., and Michel, J., “Direct band gap narrowing in highly doped Ge”, Applied Physics Letters, vol. 102. 2013.
X. Wang, Kimerling, L. C., Michel, J., and Liu, J., “Large inherent optical gain from the direct gap transition of Ge thin films”, Applied Physics Letters, vol. 102. 2013.
P. T. Lin, Singh, V., Cai, Y., Kimerling, L. C., and Agarwal, A. M., “Air-clad silicon pedestal structures for broadband mid-infrared microphotonics”, Optics Letters, vol. 38. pp. 1031-1033, 2013.
X. Wang et al., “Infrared absorption of n-type tensile-strained Ge-on-Si”, Optics Letters, vol. 38. pp. 652-654, 2013.
L. C. Kimerling and Michel, J., The Ge-on-Si Integrated Microphotonic Platform. 2013.
L. Bi et al., On-chip Nonreciprocal Photonic Devices using Magneto-Optical Oxide Thin Films. 2013.
P. T. Lin et al., “Chip-scale Mid- Infrared chemical sensors using air-clad pedestal silicon waveguides”, Lab on a Chip, vol. 13. pp. 2161-2166, 2013.
L. Z. Broderick, Albert, B. R., Pearson, B. S., Kimerling, L. C., and Michel, J., “Solar spectral variations and their influence on concentrator solar cell performance”, High and Low Concentrator Systems for Solar Electric Applications Viii, vol. 8821. p. UNSP - 88210I, 2013.
J. Mu, Ragunathan, V., Zhang, L., Okamoto, S., Kimerling, L. C., and Michel, J., “Development of a chip-to-chip optical interconnect system”, 2013 Ieee Optical Interconnects Conference. pp. 116-117, 2013.

2012

L. Zhang et al., “On-Chip Octave-Spanning Supercontinuum in Nanostructured Silicon Waveguides Using Ultralow Pulse Energy”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 18. pp. 1799-1806, 2012.
R. E. Camacho-Aguilera, Cai, Y., Bessette, J. T., Kimerling, L. C., and Michel, J., “High active carrier concentration in n-type, thin film Ge using delta-doping”, Optical Materials Express, vol. 2. pp. 1462-1469, 2012.
V. Raghunathan, Yaguee, J. L., Xu, J., Michel, J., Gleason, K. K., and Kimerling, L. C., “Co-polymer clad design for high performance athermal photonic circuits”, Optics Express, vol. 20. pp. 20808-20813, 2012.
J. Liu, Kimerling, L. C., and Michel, J., “Monolithic Ge-on-Si lasers for large-scale electronic-photonic integration”, Semiconductor Science and Technology, vol. 27. 2012.
J. M. Giammarco et al., “Enrichment polymer systems for FT-IR detection of chemical vapors”, Abstracts of Papers of the American Chemical Society, vol. 244. 2012.
A. P. Soliani et al., “Gradient films from shape memory nanofoams for unattended sensing”, Abstracts of Papers of the American Chemical Society, vol. 244. 2012.
Y. Cai, Camacho-Aguilera, R., Bessette, J. T., Kimerling, L. C., and Michel, J., “High phosphorous doped germanium: Dopant diffusion and modeling”, Journal of Applied Physics, vol. 112. 2012.
A. Canciamilla et al., “Photo-induced trimming of chalcogenide-assisted silicon waveguides”, Optics Express, vol. 20. pp. 15807-15817, 2012.
V. Raghunathan, Izuhara, T., Michel, J., and Kimerling, L. C., “Stability of polymer-dielectric bi-layers for athermal silicon photonics”, Optics Express, vol. 20. pp. 16059-16066, 2012.
X. Sheng, Hu, J., Michel, J., and Kimerling, L. C., “Light trapping limits in plasmonic solar cells: an analytical investigation”, Optics Express, vol. 20. pp. A496 - A501, 2012.
J. Wang, Zens, T., Hu, J., Becla, P., Kimerling, L. C., and Agarwal, A. M., “Monolithically integrated, resonant-cavity-enhanced dual-band mid-infrared photodetector on silicon”, Applied Physics Letters, vol. 100. 2012.
R. E. Camacho-Aguilera et al., “An electrically pumped germanium laser”, Optics Express, vol. 20. pp. 11316-11320, 2012.
B. Wang et al., “Photoluminescence quantum efficiency and energy transfer of ErRE silicate (RE = Y, Yb) thin films”, Journal of Physics D-Applied Physics, vol. 45. 2012.
M. Stefancich et al., “Single element spectral splitting solar concentrator for multiple cells CPV system”, Optics Express, vol. 20. pp. 9004-9018, 2012.
V. Singh, Hu, J., Agarwal, A. M., and Kimerling, L. C., “Integrated Optical Sensors”, Ieee Photonics Journal, vol. 4. pp. 638-641, 2012.
X. Sheng, Johnson, S. G., Broderick, L. Z., Michel, J., and Kimerling, L. C., “Integrated photonic structures for light trapping in thin-film Si solar cells”, Applied Physics Letters, vol. 100. 2012.
K. A. McComber, Duan, X., Liu, J., Michel, J., and Kimerling, L. C., “Single-Crystal Germanium Growth on Amorphous Silicon”, Advanced Functional Materials, vol. 22. pp. 1049-1057, 2012.
J. Liu et al., “Ge-on-Si optoelectronics”, Thin Solid Films, vol. 520. pp. 3354-3360, 2012.
P. T. Lin et al., “Engineering broadband and anisotropic photoluminescence emission from rare earth doped tellurite thin film photonic crystals”, Optics Express, vol. 20. pp. 2124-2135, 2012.
Y. Cai, Camacho-Aguilera, R., Bessette, J. T., Kimerling, L. C., and Michel, J., “Dopant Enhanced Diffusion For High n-type Doped Ge”, Sige, Ge, and Related Compounds 5: Materials, Processing, and Devices, vol. 50. pp. 263-266, 2012.
L. Zhang, Lin, Q., Agarwal, A. M., Kimerling, L. C., and Michel, J., “On-Chip Sub-Cycle Pulse Generation via a Two-Octave Supercontinuum from Visible to Mid-Infrared Wavelengths”, 2012 Conference on Lasers and Electro-Optics (cleo). 2012.
S. Grillanda et al., “Exploiting Photosensitive As2S3 Chalcogenide Glass in Photonic Integrated Circuits”, 2012 14th International Conference on Transparent Optical Networks (icton 2012). 2012.
R. Camacho-Aguilera, Cai, Y., Kimerling, L. C., and Michel, J., “Ge-on-Si Bufferless Epitaxial Growth for Photonic Devices”, Sige, Ge, and Related Compounds 5: Materials, Processing, and Devices, vol. 50. pp. 469-473, 2012.
P. T. Lin et al., Anisotropic Photoluminescence from Er-TeO2 Thin Films Photonic Crystals for On-Chip NIR Light Source. 2012.
G. Kurian et al., “Cross-layer Energy and Performance Evaluation of a Nanophotonic Manycore Processor System using Real Application Workloads”, 2012 Ieee 26th International Parallel and Distributed Processing Symposium (ipdps). pp. 1117-1130, 2012.

2011

L. Bi et al., “On-chip optical isolation in monolithically integrated non-reciprocal optical resonators”, Nature Photonics, vol. 5. pp. 758-762, 2011.
T. Zens, Becla, P., Agarwal, A. M., Kimerling, L. C., and Drehman, A., “Long wavelength infrared detection using amorphous InSb and InAs0.3Sb0.7”, Journal of Crystal Growth, vol. 334. pp. 84-89, 2011.
A. Canciamilla et al., “Photo-induced trimming of coupled ring-resonator filters and delay lines in As2S3 chalcogenide glass”, Optics Letters, vol. 36. pp. 4002-4004, 2011.
J. Wang, Hu, J., Becla, P., Agarwal, A. M., and Kimerling, L. C., “Room-temperature oxygen sensitization in highly textured, nanocrystalline PbTe films: A mechanistic study”, Journal of Applied Physics, vol. 110. 2011.
D. Ahn, Kimerling, L. C., and Michel, J., “Efficient evanescent wave coupling conditions for waveguide-integrated thin-film Si/Ge photodetectors on silicon-on-insulator/germanium-on-insulator substrates”, Journal of Applied Physics, vol. 110. 2011.
J. Giammarco et al., “Polymer enrichment nanocoating for IR-ATR waveguides”, Abstracts of Papers of the American Chemical Society, vol. 242. 2011.
X. Sheng, Johnson, S. G., Michel, J., and Kimerling, L. C., “Optimization-based design of surface textures for thin-film Si solar cells”, Optics Express, vol. 19. pp. A841 - A850, 2011.
X. Sheng et al., “Design and fabrication of high-index-contrast self-assembled texture for light extraction enhancement in LEDs”, Optics Express, vol. 19. pp. A701 - A709, 2011.
J. D. Musgraves et al., “Comparison of the optical, thermal and structural properties of Ge-Sb-S thin films deposited using thermal evaporation and pulsed laser deposition techniques”, Acta Materialia, vol. 59. pp. 5032-5039, 2011.
F. A. Tal, Dimas, C., Hu, J., Agarwal, A. M., and Kimerling, L. C., “Simulation of an erbium-doped chalcogenide micro-disk mid-infrared laser source”, Optics Express, vol. 19. pp. 11951-11962, 2011.
J. M. Giammarco et al., “Enrichment polymer layers for detection of volatile vapors by ATR FT-IR”, Abstracts of Papers of the American Chemical Society, vol. 241. 2011.
X. Sheng, Liu, J., Kozinsky, I., Agarwal, A. M., Michel, J., and Kimerling, L. C., “Design and Non-Lithographic Fabrication of Light Trapping Structures for Thin Film Silicon Solar Cells”, Advanced Materials, vol. 23. p. 843 - +, 2011.
L. C. Kimerling and Michel, J., “Monolithic Microphotonic Integration on the Silicon Platform”, Ulsi Process Integration 7, vol. 41. pp. 3-13, 2011.
J. Hu, Musgraves, D., Carlie, N., Agarwal, A. M., Richardson, K., and Kimerling, L. C., “Photothermal nano-cavities for ultra-sensitive chem-bio detection”, Chemical, Biological, Radiological, Nuclear, and Explosives (cbrne) Sensing Xii, vol. 8018. 2011.
T. Zens, Becla, P., Agarwal, A. M., Kimerling, L. C., and Drehman, A., “Amorphous InSb and InAs0.3Sb0.7 for Long Wavelength Infrared Detection”, Infrared Technology and Applications Xxxvii, vol. 8012. 2011.
J. Wang, Zens, T., Hu, J., Becla, P., Agarwal, A. M., and Kimerling, L. C., “Resonant cavity enhancement of polycrystalline PbTe films for IR detectors on Si-ROICs”, Photonic Microdevices/Microstructures for Sensing Iii, vol. 8034. 2011.
J. Giammarco et al., “Towards universal enrichment nanocoating for IR-ATR waveguides”, Chemical Communications, vol. 47. pp. 9104-9106, 2011.
J. Hu et al., “Development of chipscale chalcogenide glass based infrared chemical sensors”, Quantum Sensing and Nanophotonic Devices Viii, vol. 7945. 2011.
J. Michel, Liu, J., Kimerling, L. C., Camacho-Aguilera, R., Bessette, J. T., and Cai, Y., “A Germanium-on-Silicon Laser for On-chip Applications”, 2011 Conference on Lasers and Electro-Optics (cleo). 2011.
L. Bi, Hu, J., Dionne, G. F., Kimerling, L. C., and Ross, C. A., “Monolithic Integration of Chalcogenide glass/Iron Garnet Waveguides and Resonators for On-chip Nonreciprocal Photonic Devices”, Integrated Optics: Devices, Materials, and Technologies Xv, vol. 7941. 2011.

2010

N. Carlie et al., “Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges”, Optics Express, vol. 18. pp. 26728-26743, 2010.
D. Ahn, Kimerling, L. C., and Michel, J., “Evanescent Coupling Device Design for Waveguide-Integrated Group IV Photodetectors”, Journal of Lightwave Technology, vol. 28. pp. 3387-3394, 2010.
J. Hu, Lin, S., Kimerling, L. C., and Crozier, K., “Optical trapping of dielectric nanoparticles in resonant cavities”, Physical Review A, vol. 82. 2010.
K. -Y. Tu et al., “Silicon RF-Photonic Filter and Down-Converter”, Journal of Lightwave Technology, vol. 28. pp. 3019-3028, 2010.
X. Sheng, Liu, J., Coronel, N., Agarwal, A. M., Michel, J., and Kimerling, L. C., “Integration of Self-Assembled Porous Alumina and Distributed Bragg Reflector for Light Trapping in Si Photovoltaic Devices”, Ieee Photonics Technology Letters, vol. 22. pp. 1394-1396, 2010.
J. M. Giammarco et al., “Grafted enrichment polymer layer system for waveguide sensor”, Abstracts of Papers of the American Chemical Society, vol. 240. 2010.
J. M. Giammarco et al., “Design and application of multiple polymer layered systems to facilitate waveguide sensor detection”, Abstracts of Papers of the American Chemical Society, vol. 240. 2010.
V. Raghunathan, Ye, W. N., Hu, J., Izuhara, T., Michel, J., and Kimerling, L. C., “Athermal operation of Silicon waveguides: spectral, second order and footprint dependencies”, Optics Express, vol. 18. pp. 17631-17639, 2010.
J. Michel, Liu, J., and Kimerling, L. C., “High-performance Ge-on-Si photodetectors”, Nature Photonics, vol. 4. pp. 527-534, 2010.
D. Underwood et al., “New optical technology for low mass intelligent trigger and readout”, Journal of Instrumentation, vol. 5. 2010.
J. Wang, Hu, J., Becla, P., Agarwal, A. M., and Kimerling, L. C., “Resonant-cavity-enhanced mid-infrared photodetector on a silicon platform”, Optics Express, vol. 18. pp. 12890-12896, 2010.
J. Hu et al., “Resonant cavity-enhanced photosensitivity in As2S3 chalcogenide glass at 1550 nm telecommunication wavelength”, Optics Letters, vol. 35. pp. 874-876, 2010.
J. Liu, Sun, X., Camacho-Aguilera, R., Kimerling, L. C., and Michel, J., “Ge-on-Si laser operating at room temperature”, Optics Letters, vol. 35. pp. 679-681, 2010.
J. Wang, Hu, J., Sun, X., Agarwal, A. M., and Kimerling, L. C., “Cavity-enhanced multispectral photodetector using phase-tuned propagation: theory and design”, Optics Letters, vol. 35. pp. 742-744, 2010.
K. Richardson et al., “PROGRESS ON THE FABRICATION OF ON-CHIP, INTEGRATED CHALCOGENIDE GLASS (CHG)-BASED SENSORS”, Journal of Nonlinear Optical Physics & Materials, vol. 19. pp. 75-99, 2010.
R. Chatterjee, Yu, M., Stein, A., Kwong, D. -L., Kimerling, L. C., and Wong, C. W., “Demonstration of a hitless bypass switch using nanomechanical perturbation for high-bitrate transparent networks”, Optics Express, vol. 18. pp. 3045-3058, 2010.
X. Sun, Liu, J., Kimerling, L. C., and Michel, J., “Toward a Germanium Laser for Integrated Silicon Photonics”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 16. pp. 124-131, 2010.
J. Hu et al., “Optical loss reduction in high-index-contrast chalcogenide glass waveguides via thermal reflow”, Optics Express, vol. 18. pp. 1469-1478, 2010.
M. Vanhoutte, Wang, B., Zhou, Z., Michel, J., and Kimerling, L. C., “Direct demonstration of sensitization at 980nm optical excitation in erbium-ytterbium silicates”, 2010 7th Ieee International Conference on Group Iv Photonics (gfp). pp. 308-310, 2010.
X. Sheng, Liu, J., Kozinsky, I., Agarwal, A. M., Michel, J., and Kimerling, L. C., “Efficient Light Trapping Structure in Thin Film Silicon Solar Cells”, 35th Ieee Photovoltaic Specialists Conference. pp. 1575-1576, 2010.
E. Gulsen, Olivetti, E. A., Kimerling, L. C., and Kirchain, R., Energy Concerns in Information and Communication Technology and the Potential for Photonics Integration. 2010.
L. C. Kimerling, Scaling Information Technology on the Silicon Platform. 2010.
L. Bi, Hu, J., Kimerling, L. C., and Ross, C. A., “Fabrication and characterization of As(2)S(3)/Y(3)Fe(5)O(12) and Y(3)Fe(5)O(12)/SOI strip-loaded waveguides for integrated optical isolator applications”, Integrated Optics: Devices, Materials, and Technologies Xiv, vol. 7604. 2010.
J. Hu et al., “Towards on-chip, integrated chalcogenide glass based biochemical sensors”, 2010 Conference on Optical Fiber Communication Ofc Collocated National Fiber Optic Engineers Conference Ofc-Nfoec. 2010.
K. A. McComber, Liu, J., Michel, J., and Kimerling, L. C., “Low-temperature germanium ultra-high vacuum chemical vapor deposition for back-end photonic device integration”, 2010 7th Ieee International Conference on Group Iv Photonics (gfp). pp. 57-59, 2010.
G. Kurian et al., ATAC: A 1000-Core Cache-Coherent Processor with On-Chip Optical Network. 2010.
J. Liu, Sun, X., Camacho-Aguilera, R., Cai, Y., Kimerling, L. C., and Michel, J., “Monolithic Ge-on-Si Lasers for Integrated Photonics”, 2010 7th Ieee International Conference on Group Iv Photonics (gfp). pp. 1-3, 2010.
J. Liu, Sun, X., Camacho-Aguilera, R., Kimerling, L. C., and Michel, J., “Band-Engineered Ge-on-Si Lasers for Integrated Photonics”, Sige, Ge, and Related Compounds 4: Materials, Processing, and Devices, vol. 33. pp. 539-543, 2010.
J. Liu, Sun, X., Camacho-Aguilera, R., Cai, Y., Kimerling, L. C., and Michel, J., Optical Gain and Lasing from Band-Engineered Ge-on-Si at Room Temperature. 2010.

2009

J. Hu, Carlie, N., Petit, L., Agarwal, A. M., Richardson, K., and Kimerling, L. C., “Cavity-Enhanced IR Absorption in Planar Chalcogenide Glass Microdisk Resonators: Experiment and Analysis”, Journal of Lightwave Technology, vol. 27. pp. 5240-5245, 2009.
S. Lin, Hu, J., Kimerling, L. C., and Crozier, K., “Design of nanoslotted photonic crystal waveguide cavities for single nanoparticle trapping and detection”, Optics Letters, vol. 34. pp. 3451-3453, 2009.
L. Petit et al., “Compositional dependence of the nonlinear refractive index of new germanium-based chalcogenide glasses”, Journal of Solid State Chemistry, vol. 182. pp. 2756-2761, 2009.
J. Giammarco et al., “COLL 170-Fabrication and characterization of grafted enrichment layers for evanescent wave sensors”, Abstracts of Papers of the American Chemical Society, vol. 238. 2009.
R. Sun, Cheng, J., Michel, J., and Kimerling, L. C., “Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process”, Optics Letters, vol. 34. pp. 2378-2380, 2009.
X. Sun, Liu, J., Kimerling, L. C., and Michel, J., “Direct gap photoluminescence of n-type tensile-strained Ge-on-Si”, Applied Physics Letters, vol. 95. 2009.
M. S. Rasras et al., “Demonstration of a Tunable Microwave-Photonic Notch Filter Using Low-Loss Silicon Ring Resonators”, Journal of Lightwave Technology, vol. 27. pp. 2105-2110, 2009.
J. Liu, Sun, X., Kimerling, L. C., and Michel, J., “Direct-gap optical gain of Ge on Si at room temperature”, Optics Letters, vol. 34. pp. 1738-1740, 2009.
J. Hu, Sun, X., Agarwal, A. M., and Kimerling, L. C., “Design guidelines for optical resonator biochemical sensors”, Journal of the Optical Society of America B-Optical Physics, vol. 26. pp. 1032-1041, 2009.
X. Sun, Liu, J., Kimerling, L. C., and Michel, J., “Room-temperature direct bandgap electroluminesence from Ge-on-Si light-emitting diodes”, Optics Letters, vol. 34. pp. 1198-1200, 2009.
Z. Zhou and Kimerling, L. C., “Editorial for Focus Issue on Silicon Photonics”, Chinese Optics Letters, vol. 7. pp. 267-267, 2009.
J. Liu et al., “Efficient above-band-gap light emission in germanium”, Chinese Optics Letters, vol. 7. pp. 271-273, 2009.
R. Sun et al., “Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer”, Applied Physics Letters, vol. 94. 2009.
B. Zdyrko et al., “Polymer coatings as enrichment layers for evanescent wave sensors”, Abstracts of Papers of the American Chemical Society, vol. 237. 2009.
S. Saini, Hong, C. -Y., Bernardis, S., Pfaff, N., Kimerling, L. C., and Michel, J., “Hybrid waveguides for optically pumped amplifiers”, Applied Physics Letters, vol. 94. 2009.
D. Ahn, Hong, C. -yin, Kimerling, L. C., and Michel, J., “Coupling efficiency of monolithic, waveguide-integrated Si photodetectors”, Applied Physics Letters, vol. 94. 2009.
L. Petit et al., “Development of novel integrated bio/chemical sensor systems using chalcogenide glass materials”, International Journal of Nanotechnology, vol. 6. pp. 799-815, 2009.
X. Sun, Liu, J., Kimerling, L. C., and Michel, J., A Ge-on-Si Laser for Electronic-Photonic Integration. 2009.
L. Bi, Kim, H. -S., Hu, J., Kimerling, L. C., and Ross, C. A., “As(2)S(3)/Sr(Ti(0.7)Co(0.3))O(3) and As(2)S(3)/Sr(Ti(0.6)Fe(0.4))O(3) strip-loaded waveguides for integrated magneto-optical isolator applications”, in Integrated Optics: Devices, Materials, and Technologies Xiii, vol. 7218, 2009.
J. Liu, Beals, M., Michel, J., and Kimerling, L. C., “Light up the Future of Silicon Microprocessors”, in Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based Cmos 5: New Materials, Processes, and Equipment, vol. 19, 2009, pp. 17-28.
X. Sheng, Liu, J., Michel, J., Agarwal, A. M., and Kimerling, L. C., “LOW-COST, DETERMINISTIC QUASI-PERIODIC PHOTONIC STRUCTURES FOR LIGHT TRAPPING IN THIN FILM SILICON SOLAR CELLS”, in 2009 34th Ieee Photovoltaic Specialists Conference, Vols 1-3, 2009, pp. 2429-2432.
J. Hu et al., Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow. 2009.
L. Zeng et al., “Realization of Significant Absorption Enhancement in Thin Film Silicon Solar Cells with Textured Photonic Crystal Backside Reflector”, in Photovoltaic Materials and Manufacturing Issues, vol. 1123, 2009, pp. 53-58.
L. C. Kimerling et al., Si-Rich Dielectrics for Active Photonic Devices. 2009.
S. Lin, Hu, J., Kimerling, L. C., and Crozier, K., Design of Nanoslotted Photonic Crystal Waveguide Cavities for Single Nanoparticle Trapping. 2009.

2008

S. Saini, Hong, C. -Y., Pfaff, N., Kimerling, L. C., and Michel, J., “Partial confinement photonic crystal waveguides”, Applied Physics Letters, vol. 93. 2008.
L. Zeng et al., “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector”, Applied Physics Letters, vol. 93. 2008.
T. Anderson et al., “Femtosecond laser photo-response of Ge23Sb7S70 films”, Optics Express, vol. 16. pp. 20081-20098, 2008.
J. Hu et al., “Planar waveguide-coupled, high-index-contrast, high-Q resonators in chalcogenide glass for sensing”, Optics Letters, vol. 33. pp. 2500-2502, 2008.
R. Sun et al., “Theoretical modeling on hydrogen evolution in ultraviolet light-treated hydrogenated silicon nitride”, Journal of Applied Physics, vol. 104. 2008.
V. Sorianello, Perna, A., Colace, L., Assanto, G., Luan, H. C., and Kimerling, L. C., “Near-infrared absorption of germanium thin films on silicon”, Applied Physics Letters, vol. 93. 2008.
J. Wang et al., “Structural, electrical, and optical properties of thermally evaporated nanocrystalline PbTe films”, Journal of Applied Physics, vol. 104. 2008.
B. Zdyrko et al., “ANYL 47-Polymer coatings for enhancement of chalcogenide based IR sensor”, Abstracts of Papers of the American Chemical Society, vol. 236. 2008.
R. Sun et al., “Impedance matching vertical optical waveguide couplers for dense high index contrast circuits”, Optics Express, vol. 16. pp. 11682-11690, 2008.
J. Liu et al., “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators”, Nature Photonics, vol. 2. pp. 433-437, 2008.
W. N. Ye, Michel, J., and Kimerling, L. C., “Athermal high-index-contrast waveguide design”, Ieee Photonics Technology Letters, vol. 20. pp. 885-887, 2008.
J. Hu et al., “Exploration of waveguide fabrication from thermally evaporated Ge-Sb-S glass films”, Optical Materials, vol. 30. pp. 1560-1566, 2008.
J. Hu, Carlie, N., Petit, L., Agarwal, A. M., Richardson, K., and Kimerling, L. C., “Demonstration of chalcogenide glass racetrack microresonators”, Optics Letters, vol. 33. pp. 761-763, 2008.
W. N. Ye, Sun, R., Michel, J., Eldada, L., Pant, D., and Kimerling, L. C., Thermo-optical Compensation in High-index-contrast Waveguides. 2008.
J. Liu, Sun, X., Becla, P., Kimerling, L. C., and Michel, J., Towards a Ge-based Laser for CMOS Applications. 2008.
J. Liu et al., Ultralow Energy, Integrated GeSi Electroabsorption Modulators on SOI. 2008.
J. Hu et al., “Design, fabrication and integration of HIC glass waveguides on a silicon platform - art. no. 68960Z”, in Integrated Optics: Devices, Materials, and Technologies Xii, vol. 6896, 2008, pp. Z8960 - Z8960.
X. Sun, Liu, J., Kimerling, L. C., and Michel, J., “Optical Bleaching of Thin Film Ge on Si”, in Sige, Ge, and Related Compounds 3: Materials, Processing, and Devices, vol. 16, 2008, pp. 881-889.
W. N. Ye, Michel, J., Kimerling, L. C., and Eldada, L., “Polymer-cladded athermal high-index-contrast waveguides”, in Optoelectronic Integrated Circuits X, vol. 6897, 2008, pp. U103 - U110.
M. Beals et al., “Process flow innovations for photonic device integration in CMOS - art. no. 689804”, in Silicon Photonics Iii, vol. 6898, 2008, pp. 89804-89804.

2007

R. Sun et al., “Horizontal single and multiple slot waveguides: optical transmission at lambda=1550 nm”, Optics Express, vol. 15. pp. 17967-17972, 2007.
D. D. Cannon et al., “Germanium-rich silicon-germanium films epitaxially grown by ultrahigh vacuum chemical-vapor deposition directly on silicon substrates”, Applied Physics Letters, vol. 91. 2007.
P. Bermel, Luo, C., Zeng, L., Kimerling, L. C., and Joannopoulos, J. D., “Improving thin-film crystalline silicon solar cell efficiencies with photonic crystals”, Optics Express, vol. 15. pp. 16986-17000, 2007.
J. Hu et al., “Low-loss high-index-contrast planar waveguides with graded-index cladding layers”, Optics Express, vol. 15. pp. 14566-14572, 2007.
J. Hu et al., “Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides”, Optics Express, vol. 15. pp. 11798-11807, 2007.
J. Liu et al., “Tensile-strained, n-type Ge as a gain medium for monolithic laser integration on Si”, Optics Express, vol. 15. pp. 11272-11277, 2007.
A. Yokoo, Wada, K., and Kimerling, L. C., “Pattern size reduction of nanoprint-fabricated structures oil heat-shrinkable film”, Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers, vol. 46. pp. 6395-6397, 2007.
N. -N. Feng, Sun, R., Michel, J., and Kimerling, L. C., “Low-loss compact-size slotted waveguide polarization rotator and transformer”, Optics Letters, vol. 32. pp. 2131-2133, 2007.
N. -N. Feng et al., “Design of highly efficient light-trapping structures for thin-film crystalline silicon solar cells”, Ieee Transactions on Electron Devices, vol. 54. pp. 1926-1933, 2007.
M. Hiltunen, Dal Negro, L., Feng, N. -N., Kimerling, L. C., and Michel, J., “Modeling of aperiodic fractal waveguide structures for multifrequency light transport”, Journal of Lightwave Technology, vol. 25. pp. 1841-1847, 2007.
R. Kirchain and Kimerling, L. C., “A roadmap for nanophotonics”, Nature Photonics, vol. 1. pp. 303-305, 2007.
N. -N. Feng, Sun, R., Kimerling, L. C., and Michel, J., “Lossless strip-to-slot waveguide transformer”, Optics Letters, vol. 32. pp. 1250-1252, 2007.
R. Sun et al., “High performance asymmetric graded index coupler with integrated lens for high index waveguides”, Applied Physics Letters, vol. 90. 2007.
D. Ahn et al., “High performance, waveguide integrated Ge photodetectors”, Optics Express, vol. 15. pp. 3916-3921, 2007.
J. Hu et al., “Studies on structural, electrical, and optical properties of Cu doped As-Se-Te chalcogenide glasses”, Journal of Applied Physics, vol. 101. 2007.
J. Hu et al., “Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor”, Optics Express, vol. 15. pp. 2307-2314, 2007.
J. Liu, Pan, D., Jongthammanurak, S., Wada, K., Kimerling, L. C., and Michel, J., “Design of monolithically integrated GeSi electro-absorption modulators and photodetectors on an SOI platform”, Optics Express, vol. 15. pp. 623-628, 2007.
M. S. Rasras et al., “Demonstration of a fourth-order pole-zero optical filter integrated using CMOS processes”, Journal of Lightwave Technology, vol. 25. pp. 87-92, 2007.
J. Hu et al., “Low-loss integrated planar chalcogenide waveguides for microfluidic chemical sensing - art. no. 64440N”, in Ultrasensitive and Single-Molecule Detection Technologies II, vol. 6444, 2007, pp. N4440 - N4440.
J. Michel et al., “Advances in fully CMOS integrated photonic devices - art. no. 64770P”, in Silicon Photonics II, vol. 6477, 2007, pp. P4770 - P4770.
J. Liu et al., Ge-based active devices for Si photonics. 2007.

2006

L. Dal Negro et al., “Synthesis, characterization, and modeling of nitrogen-passivated colloidal and thin film silicon nanocrystals”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 12. pp. 1151-1163, 2006.
L. Dal Negro et al., “Light-emitting silicon nanocrystals and photonic structures in silicon nitride”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 12. pp. 1628-1635, 2006.
Y. Yi, Akiyama, S., Bermel, P., Duan, X., and Kimerling, L. C., “Sharp bending of on-chip silicon Bragg cladding waveguide with light guiding in low index core materials”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 12. pp. 1345-1348, 2006.
J. Linnros, Gregorkiewicz, T., Elliman, R., and Kimerling, L. C., “Silicon-based photonics”, Journal of Luminescence, vol. 121. p. V - V, 2006.
L. Colace, Balbi, M., Masini, G., Assanto, G., Luan, H. -C., and Kimerling, L. C., “Si-based near infrared photodetectors operating at 10 Gbit/s”, Journal of Luminescence, vol. 121. pp. 413-416, 2006.
X. C. Sun et al., “Multispectral pixel performance using a one-dimensional photonic crystal design”, Applied Physics Letters, vol. 89. 2006.
S. Jongthammanurak et al., “Large electro-optic effect in tensile strained Ge-on-Si films”, Applied Physics Letters, vol. 89. 2006.
D. T. Danielson, Sparacin, D. K., Michel, J., and Kimerling, L. C., “Surface-energy-driven dewetting theory of silicon-on-insulator agglomeration”, Journal of Applied Physics, vol. 100. 2006.
N. -N. Feng, Michel, J., and Kimerling, L. C., “Optical field concentration in low-index waveguides”, Ieee Journal of Quantum Electronics, vol. 42. pp. 885-890, 2006.
L. Zeng et al., “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector”, Applied Physics Letters, vol. 89. 2006.
F. Gan et al., “Design of all-optical switches based on carrier injection in Si/SiO2 split-ridge waveguides (SRWs)”, Journal of Lightwave Technology, vol. 24. pp. 3454-3463, 2006.
L. Dal Negro et al., “Light emission efficiency and dynamics in silicon-rich silicon nitride films”, Applied Physics Letters, vol. 88. 2006.
K. Wada, Ahn, D. H., Lim, D. R., Michel, J., and Kimerling, L. C., “Si microphotonics for optical interconnection”, Thin Solid Films, vol. 508. pp. 418-421, 2006.
O. O. Olubuyide, Danielson, D. T., Kimerling, L. C., and Hoyt, J. L., “Impact of seed layer on material quality of epitaxial germanium on silicon deposited by low pressure chemical vapor deposition”, Thin Solid Films, vol. 508. pp. 14-19, 2006.
L. Dal Negro, Yi, J. H., Kimerling, L. C., Hamel, S., Williamson, A., and Galli, G., “Light emission from silicon-rich nitride nanostructures”, Applied Physics Letters, vol. 88. 2006.
L. Colace, Balbi, M., Masini, G., Assanto, G., Luan, H. C., and Kimerling, L. C., “Ge on Si p-i-n photodiodes operating at 10 Gbit/s”, Applied Physics Letters, vol. 88. 2006.
V. Nguyen et al., “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems”, Applied Physics Letters, vol. 88. 2006.
S. Jongthammanurak et al., Large electro-optic effect in tensile strained Ge-on-Si films. 2006.
F. X. Kaertner et al., “Si/Ge semiconductor saturable Bragg reflectors for integrated mode-locked lasers”, in 2006 IEEE LEOS Annual Meeting Conference Proceedings, Vols 1 and 2, 2006, pp. 244-245.
L. Dal Negro, Yi, J. H., Koklu, H., Michel, J., and Kimerling, L. C., “Light emission from silicon-based nano-materials”, in 2006 IEEE LEOS Annual Meeting Conference Proceedings, Vols 1 and 2, 2006, pp. 544-544.
J. F. Liu et al., Waveguide integrated Ge p-i-n photodetectors on a silicon-on-insulator platform. 2006.
L. Dal Negro et al., “Light-emitting silicon-rich nitride systems and photonic structures”, Journal of Experimental Nanoscience, vol. 1. pp. 29-50, 2006.
J. F. Liu et al., Waveguide-integrated Ge p-i-n photodetectors on SOI platform. 2006.
D. K. Sparacin et al., Low loss amorphous silicon channel waveguides for integrated photonics. 2006.
X. C. Sun et al., Multispectral 1-D photonic crystal photodetector. 2006.
V. Nguyen et al., Asymmetric GRIN lensed single mode fiber-to-waveguide coupler. 2006.
L. Zeng et al., “New solar cells with novel light trapping via textured photonic crystal back reflector”, in Progress in Semiconductor Materials V-Novel Materials and Electronic and Optoelectronic Applications, vol. 891, 2006, pp. 251-256.
F. X. Kartner et al., “Electronic photonic integrated circuits for high speed, high resolution, analog to digital conversion - art. no. 612503”, in Silicon Photonics, vol. 6125, 2006, pp. 12503-12503.
L. C. Kimerling et al., “Electronic-photonic integrated circuits on the CMOS platform - art. no. 612502”, in Silicon Photonics, vol. 6125, 2006, pp. 12502-12502.
K. Wada et al., “Si microphotonics for optical interconnection”, in Optical Interconnects: The Silicon Approach, 2006, pp. 291-310.

2005

J. F. Liu et al., “High-performance, tensile-strained Ge p-i-n photodetectors on a Si platform”, Applied Physics Letters, vol. 87. 2005.
D. K. Sparacin, Hong, C. Y., Kimerling, L. C., Michel, J., Lock, J. P., and Gleason, K. K., “Trimming of microring resonators by photo-oxidation of a plasma-polymerized organosilane cladding material”, Optics Letters, vol. 30. pp. 2251-2253, 2005.
D. K. Sparacin, Spector, S. J., and Kimerling, L. C., “Silicon waveguide sidewall smoothing by wet chemical oxidation”, Journal of Lightwave Technology, vol. 23. pp. 2455-2461, 2005.
J. F. Liu et al., “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications”, Applied Physics Letters, vol. 87. 2005.
Y. Ishikawa et al., “Strain-induced enhancement of near-infrared absorption in Ge epitaxial layers grown on Si substrate”, Journal of Applied Physics, vol. 98. 2005.
S. Akiyama et al., “Air trench bends and splitters for dense optical integration in low index contrast”, Journal of Lightwave Technology, vol. 23. pp. 2271-2277, 2005.
S. Akiyama et al., “Fabrication of highly reflecting epitaxy-ready Si-SiO2 Bragg reflectors”, Ieee Photonics Technology Letters, vol. 17. pp. 1456-1458, 2005.
L. Dal Negro, Yi, J. H., Nguyen, V., Yi, Y., Michel, J., and Kimerling, L. C., “Spectrally enhanced light emission from aperiodic photonic structures”, Applied Physics Letters, vol. 86. 2005.
K. K. Lee et al., “Mode transformer for miniaturized optical circuits”, Optics Letters, vol. 30. pp. 498-500, 2005.
F. J. Grawert et al., “220-fs erbium-ytterbium : glass laser mode locked by a broadband low-loss silicon/germanium saturable absorber”, Optics Letters, vol. 30. pp. 329-331, 2005.
O. I. Dosunmu, Cannon, D. D., Emsley, M. K., Kimerling, L. C., and Unlu, M. S., “High-speed resonant cavity enhanced Ge photodetectors on reflecting Si substrates for 1550-nm operation”, Ieee Photonics Technology Letters, vol. 17. pp. 175-177, 2005.
L. Dal Negro, Yi, J. H., Nguyen, V., Yi, Y., Michel, J., and Kimerling, L. C., “Light emission in aperiodic Thue-Morse dielectrics”, in Group-IV Semiconductor Nanostructures, vol. 832, 2005, pp. 15-20.
L. Dal Negro et al., Light emitting silicon nanostructures. 2005.
L. R. Zeng, Yi, Y., Hong, C. Y., Duan, X. M., and Kimerling, L. C., “New light trapping in thin film solar cells using textured photonic crystals”, in Amorphous and Nanocrystalline Silicon Science and Technology-2005, vol. 862, 2005, pp. 381-386.
Y. H. Yi, Bermel, P., Akiyama, S., Duan, X. M., and Kimerling, L. C., “On-chip silicon based waveguide with light guiding in low index core materials”, in Optoelectronic Integration on Silicon II, vol. 5730, 2005, pp. 181-187.
M. Stolfi et al., “CMOS compatible erbium coupled Si nanocrystal thin films for microphotonics”, in Group-IV Semiconductor Nanostructures, vol. 832, 2005, pp. 373-377.
V. Nguyen et al., Compact 3dB single mode fiber-to-waveguide coupler. 2005.
D. K. Sparacin, Lock, J. P., Hong, C. Y., Gleason, K. K., Kimerling, L. C., and Michel, J., Trimming of silicon nitride microring resonators with a polysilane top cladding. 2005.
L. Dal Negro, Stolfi, M., Michel, J., Le Blanc, J., Haavisto, J., and Kimerling, L. C., Energy sensitization in erbium-doped silicon-rich oxide films annealed at low temperatures. 2005.
J. Michel et al., High performance Ge p-i-n photodetectors on Si. 2005.
J. F. Liu et al., “High speed Ge photodetectors on Si platform for GHz optical communications in C+L bands”, in Progress in Compound Semiconductor Materials IV-Electronic and Optoelectronic Applications, vol. 829, 2005, pp. 285-289.

2004

Y. S. Yi, Sandland, J. G., Akiyama, S., Duan, X. M., and Kimerling, L. C., “Prism coupling to on-chip silicon based bragg cladding waveguide”, Applied Physics Letters, vol. 85. pp. 3381-3383, 2004.
Y. Yi, Akiyama, S., Bermel, P., Duan, X. M., and Kimerling, L. C., “On-chip Si-based Bragg cladding waveguide with high index contrast bilayers”, Optics Express, vol. 12. pp. 4775-4780, 2004.
J. F. Liu et al., “Deformation potential constants of biaxially tensile stressed Ge epitaxial films on Si(100)”, Physical Review B, vol. 70. 2004.
O. I. Dosunmu et al., “Resonant cavity enhanced Ge photodetectors for 1550 nm operation on reflecting Si substrates”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 10. pp. 694-701, 2004.
S. Saini, Chen, K., Duan, X. M., Michel, J., Kimerling, L. C., and Lipson, M., “Er2O3 for high-gain waveguide amplifiers”, Journal of Electronic Materials, vol. 33. pp. 809-814, 2004.
L. Dal Negro et al., “Photon band gap properties and omnidirectional reflectance in Si/SiO2 Thue-Morse quasicrystals”, Applied Physics Letters, vol. 84. pp. 5186-5188, 2004.
C. W. Wong et al., “Strain-tunable silicon photonic band gap microcavities in optical waveguides (vol 84, pg 1242, 2004)”, Applied Physics Letters, vol. 84. pp. 2955-2955, 2004.
C. W. Wong et al., “Strain-tunable silicon photonic band gap microcavities in optical waveguides”, Applied Physics Letters, vol. 84. pp. 1242-1244, 2004.
D. D. Cannon et al., “Tensile strained epitaxial Ge films on Si(100) substrates with potential application in L-band telecommunications”, Applied Physics Letters, vol. 84. pp. 906-908, 2004.
J. F. Liu et al., “Silicidation-induced band gap shrinkage in Ge epitaxial films on Si”, Applied Physics Letters, vol. 84. pp. 660-662, 2004.
S. Saini et al., “A high index contrast silicon oxynitride materials platform for Er-doped microphotonic amplifiers”, in New Materials for Microphotonics, vol. 817, 2004, pp. 27-33.
L. C. Kimerling et al., “Monolithic Silicon Microphotonics”, Silicon Photonics, vol. 94. pp. 89-119, 2004.
L. Dal Negro et al., “Omnidirectional reflectance and optical gap properties of Si/SiO2 Thue-Morse quasicrystals”, in New Materials for Microphotonics, vol. 817, 2004, pp. 75-81.
F. J. Grawert et al., “Silicon-germanium saturable absorber mirrors”, in 2004 Ieee Leos Annual Meeting Conference Proceedings, Vols 1 and 2, 2004, pp. 735-736.
J. F. Liu et al., “A 20GHz, tensile strained Ge photodetector on Si platform with broad detection spectrum for optical communications and on-chip applications”, in 2004 Ieee Leos Annual Meeting Conference Proceedings, Vols 1 and 2, 2004, pp. 150-151.
S. Akiyama, Wada, K., Michel, J., Kimerling, L. C., Popovic, M. A., and Haus, H. A., “Air trench waveguide bend for high density optical integration”, in Integrated Optics: Devices, Materials, and Technologies Viii, vol. 5355, 2004, pp. 14-21.
Y. Yi, Akiyama, S., Duan, X. M., and Kimerling, L. C., Development of new Si-based waveguide: Photonic crystal cladded waveguide. 2004.

2003

S. Saini, Michel, J., and Kimerling, L. C., “Index contrast scaling for optical amplifiers”, Journal of Lightwave Technology, vol. 21. pp. 2368-2376, 2003.
G. Taraschi, Saini, S., Fan, W. W., Kimerling, L. C., and Fitzgerald, E. A., “Nanostructure and infrared photoluminescence of nanocrystalline Ge formed by reduction of Si0.75Ge0.25O2/Si0.75Ge0.25 using various H-2 pressures”, Journal of Applied Physics, vol. 93. pp. 9988-9996, 2003.
L. V. C. Assali, Gan, F., Kimerling, L. C., and Justo, J. F., “Electronic structure of light emitting centers in Er doped Si”, Applied Physics a-Materials Science & Processing, vol. 76. pp. 991-997, 2003.
Y. Ishikawa, Wada, K., Cannon, D. D., Liu, J. F., Luan, H. C., and Kimerling, L. C., “Strain-induced band gap shrinkage in Ge grown on Si substrate”, Applied Physics Letters, vol. 82. pp. 2044-2046, 2003.
D. D. Cannon et al., “Near-infrared Ge photodetectors fabricated on Si substrates with CMOS technology”, in Optoelectronics of Group-Iv-Based Materials, vol. 770, 2003, pp. 183-187.
L. C. Kimerling, Silicon microphotonics: The next killer technology, vol. 93. 2003.
D. D. Cannon et al., “Monolithic Si-based technology for optical receiver circuits”, in Quantum Sensing: Evolution and Revolution from Past to Future, vol. 4999, 2003, pp. 145-155.

2002

Y. Yi, Bermel, P., Wada, K., Duan, X. M., Joannopoulos, J. D., and Kimerling, L. C., “Tunable multichannel optical filter based on silicon photonic band gap materials actuation”, Applied Physics Letters, vol. 81. pp. 4112-4114, 2002.
S. Zhao, Justo, J. F., Assali, L. V. C., and Kimerling, L. C., “Structure and bonding of iron-acceptor pairs in silicon”, Brazilian Journal of Physics, vol. 32. pp. 418-420, 2002.
Y. S. Yi, Bermel, P., Wada, K., Duan, X. M., Joannopoulos, J. D., and Kimerling, L. C., “Low voltage tunable one dimensional photonic crystal with large air defects”, in Materials and Devices for Optoelectronics and Microphotonics, vol. 722, 2002, pp. 391-394.
K. Wada, Luan, H. C., Lim, D. R. C., and Kimerling, L. C., “On-chip interconnection beyond semiconductor roadmap - Silicon microphotonics”, in Active and Passive Optical Components for Wdm Communications Ii, vol. 4870, 2002, pp. 437-443.

2001

K. K. Lee, Lim, D. R., Kimerling, L. C., Shin, J., and Cerrina, F., “Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction”, Optics Letters, vol. 26. pp. 1888-1890, 2001.
A. J. Reddy, Michel, J., and Kimerling, L. C., “Observation of two coupled defect levels on the hydrogen-passivated Si (100) surface”, Physica B-Condensed Matter, vol. 308. pp. 228-231, 2001.
S. Zhao, Assali, L. V. C., Justo, J. F., Gilmer, G. H., and Kimerling, L. C., “Iron-acceptor pairs in silicon: Structure and formation processes”, Journal of Applied Physics, vol. 90. pp. 2744-2754, 2001.
I. Lee, Zheng, H. P., Rubner, M. F., Kimerling, L. C., and Hammond, P. T., “2-D colloidal arrays on surfaces using patterned polyelectrolyte multilayers.”, Abstracts of Papers of the American Chemical Society, vol. 222. pp. U307 - U307, 2001.
H. C. Luan, Wada, K., Kimerling, L. C., Masini, G., Colace, L., and Assanto, G., “High efficiency photodetectors based on high quality epitaxial germanium grown on silicon substrates”, Optical Materials, vol. 17. pp. 71-73, 2001.
G. Masini, Colace, L., Assanto, G., Luan, H. C., and Kimerling, L. C., “High-performance p-i-n Ge on Si photodetectors for the near infrared: From model to demonstration”, Ieee Transactions on Electron Devices, vol. 48. pp. 1092-1096, 2001.
V. V. Emtsev, Poloskin, D. S., Shek, E. I., Sobolev, N. A., and Kimerling, L. C., “Effects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon”, Materials Science and Engineering B-Solid State Materials for Advanced Technology, vol. 81. pp. 74-76, 2001.
M. Lipson, Chen, T., Chen, K., Duan, X., and Kimerling, L. C., “Erbium in Si-based light confining structures”, Materials Science and Engineering B-Solid State Materials for Advanced Technology, vol. 81. pp. 36-39, 2001.
I. Lee et al., “Periodic patterning of colloidal particles via surface pattern matching.”, Abstracts of Papers of the American Chemical Society, vol. 221. pp. U332 - U332, 2001.
X. P. Jiang et al., “Selective self-organization of colloids on patterned polyelectrolyte templates.”, Abstracts of Papers of the American Chemical Society, vol. 221. pp. U241 - U241, 2001.
H. P. Zheng et al., “Close packed particle assemblies on patterned polyelectrolyte multilayer films.”, Abstracts of Papers of the American Chemical Society, vol. 221. pp. U350 - U350, 2001.
M. Lipson and Kimerling, L. C., “Strong Er3+-photon interaction”, Optical Materials, vol. 16. pp. 47-52, 2001.
L. M. Giovane, Luan, H. C., Agarwal, A. M., and Kimerling, L. C., “Correlation between leakage current density and threading dislocation density in SiGe p-i-n diodes grown on relaxed graded buffer layers”, Applied Physics Letters, vol. 78. pp. 541-543, 2001.
P. Kopperschmidt and Kimerling, L. C., “Model of a two-dimensional photonic bicrystal”, Physical Review B, vol. 63. 2001.
K. M. Chen, Saini, S., Lipson, M., Duan, X. M., and Kimerling, L. C., “Growth, crystallization, and room temperature photoluminescence of Er2O3 thin films”, in Rare-Earth-Doped Materials and Devices V, vol. 4282, 2001, pp. 168-173.

2000

G. Masini, Colace, L., Assanto, G., Luan, H. C., and Kimerling, L. C., “Germanium on silicon pin photodiodes for the near infrared”, Electronics Letters, vol. 36. pp. 2095-2096, 2000.
L. Liao, Lim, D. R., Agarwal, A. M., Duan, X. M., Lee, K. K., and Kimerling, L. C., “Optical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength”, Journal of Electronic Materials, vol. 29. pp. 1380-1386, 2000.
K. K. Lee, Lim, D. R., Luan, H. C., Agarwal, A. M., Foresi, J., and Kimerling, L. C., “Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model”, Applied Physics Letters, vol. 77. pp. 1617-1619, 2000.
M. Lipson and Kimerling, L. C., “Er3+ in strong light-confining microcavity”, Applied Physics Letters, vol. 77. pp. 1150-1152, 2000.
J. P. Laine, Little, B. E., Lim, D. R., Tapalian, H. C., Kimerling, L. C., and Haus, H. A., “Microsphere resonator mode characterization by pedestal anti-resonant reflecting waveguide coupler”, Ieee Photonics Technology Letters, vol. 12. pp. 1004-1006, 2000.
T. D. Chen, Agarwal, A. M., Thilderkvist, A., Michel, C., and Kimerling, L. C., “Er-doped polycrystalline silicon for light emission at gimel=1.54 mu m”, Journal of Electronic Materials, vol. 29. pp. 973-978, 2000.
A. J. Reddy, Michel, J., Parekh, B., Shyu, J. H., and Kimerling, L. C., “In situ detection of trace levels of copper in hydrofluoric acid”, Journal of the Electrochemical Society, vol. 147. pp. 2337-2339, 2000.
L. C. Kimerling, “Silicon microphotonics”, Applied Surface Science, vol. 159. pp. 8-13, 2000.
M. Lipson et al., “Er3+-photon interaction”, Journal of Luminescence, vol. 87-9. pp. 323-325, 2000.
L. Colace, Masini, G., Assanto, G., Luan, H. C., Wada, K., and Kimerling, L. C., “Efficient high-speed near-infrared Ge photodetectors integrated on Si substrates”, Applied Physics Letters, vol. 76. pp. 1231-1233, 2000.
A. L. Smith, Wada, K., and Kimerling, L. C., “Modeling of transition metal redistribution to enable wafer design for gettering”, Journal of the Electrochemical Society, vol. 147. pp. 1154-1160, 2000.
T. Gregorkiewicz et al., “Energy transfer between shallow centers and rare-earth ion cores: Er3+ ion in silicon”, Physical Review B, vol. 61. pp. 5369-5375, 2000.
B. E. Little, Laine, J. P., Lim, D. R., Haus, H. A., Kimerling, L. C., and Chu, S. T., “Pedestal antiresonant reflecting waveguides for robust coupling to microsphere resonators and for microphotonic circuits”, Optics Letters, vol. 25. pp. 73-75, 2000.
H. C. Luan et al., “Germanium photodetectors for silicon microphotonics by direct epitaxy on silicon”, in Infrared Applications of Semiconductors Iii, vol. 607, 2000, pp. 279-284.
K. M. Chen, Sparks, A. W., Luan, H. C., Lim, D. R., Wada, K., and Kimerling, L. C., “An omnidirectional reflector and microcavity resonator via the sol-gel method”, in Thin Films for Optical Waveguide Devices and Materials for Optical Limiting, vol. 597, 2000, pp. 75-80.
L. M. Giovane, Luan, H. C., Fitzgerald, E. A., and Kimerling, L. C., “Strained SiGe materials for high quantum efficiency photodiodes at lambda=1.3 to 1.5 mu m”, in Infrared Applications of Semiconductors Iii, vol. 607, 2000, pp. 255-264.
N. Toyoda et al., “Surface smoothing of polycrystalline Si waveguides with gas-cluster ion beams”, in Thin Films for Optical Waveguide Devices and Materials for Optical Limiting, vol. 597, 2000, pp. 51-55.
K. Kono, Sandland, J. G., Wada, K., and Kimerling, L. C., “Evaluation of irradiation-induced deep levels in Si”, in X-Ray and Gamma-Ray Instrumentation for Astronomy Xi, vol. 4140, 2000, pp. 267-273.
K. K. Lee, Lim, D. R., Luan, H. C., Agarwal, A. M., Foresi, J. S., and Kimerling, L. C., “The experimental and theoretical study of scattering losses in Si/SiO2 waveguides”, in Integrated Photonics Research, Technical Digest, vol. 45, 2000, pp. 116-118.

1999

K. M. Chen, Sparks, A. W., Luan, H. C., Lim, D. R., Wada, K., and Kimerling, L. C., “SiO2/TiO2 omnidirectional reflector and microcavity resonator via the sol-gel method”, Applied Physics Letters, vol. 75. pp. 3805-3807, 1999.
V. V. Emtsev et al., “Impurity effects in silicon implanted with rare-earth ions”, Physica B-Condensed Matter, vol. 273-4. pp. 346-349, 1999.
T. D. Chen, Platero, M., Opher-Lipson, M., PALM, J., Michel, J., and Kimerling, L. C., “The temperature dependence of radiative and nonradiative processes at Er-O centers in Si”, Physica B-Condensed Matter, vol. 273-4. pp. 322-325, 1999.
R. B. Capaz, Assali, L. V. C., Kimerling, L. C., Cho, K., and Joannopoulos, J. D., “"Ab initio" studies of hydrogen-enhanced oxygen diffusion in silicon”, Brazilian Journal of Physics, vol. 29. pp. 611-615, 1999.
A. L. Smith, Dunham, S. T., and Kimerling, L. C., “Transition metal defect behavior and Si density of states in the processing temperature regime”, Physica B-Condensed Matter, vol. 273-4. pp. 358-362, 1999.
A. J. Reddy et al., “Defect states at silicon surfaces”, Physica B-Condensed Matter, vol. 273-4. pp. 468-472, 1999.
H. C. Luan et al., “High-quality Ge epilayers on Si with low threading-dislocation densities”, Applied Physics Letters, vol. 75. pp. 2909-2911, 1999.
V. V. Emtsev et al., “Oxygen and Erbium related donor centers in Czochralski grown silicon implanted with erbium”, Semiconductors, vol. 33. pp. 1084-1087, 1999.
G. Masini, Colace, L., Assanto, G., Luan, H. C., Wada, K., and Kimerling, L. C., “High responsitivity near infrared Ge photodetectors integrated on Si”, Electronics Letters, vol. 35. pp. 1467-1468, 1999.
V. V. Emtsev et al., “Impurity centers in silicon doped with rare-earth impurities of dysprosium, holmium, erbium, and ytterbium”, Semiconductors, vol. 33. pp. 603-605, 1999.
R. B. Capaz, Assali, L. V. C., Kimerling, L. C., Cho, K., and Joannopoulos, J. D., “Mechanism for hydrogen-enhanced oxygen diffusion in silicon”, Physical Review B, vol. 59. pp. 4898-4900, 1999.
D. R. Lim et al., “Micron-sized channel dropping filters using silicon waveguide devices”, in Optical Devices for Fiber Communication, vol. 3847, 1999, pp. 65-71.
K. K. Lee et al., “Performance of polycrystalline silicon waveguide devices for compact on-chip optical interconnection”, in Optical Devices for Fiber Communication, vol. 3847, 1999, pp. 120-125.
K. Wada et al., “Photonic bandgap formation by wafer bonding and delamination”, in Iii-V and Iv-Iv Materials and Processing Challenges for Highly Integrated Microelectronics and Optoelectronics, vol. 535, 1999, pp. 121-126.
V. V. Emtsev et al., “Rare earth impurities and impurity-related centers in silicon”, Solid State Phenomena, vol. 70. pp. 365-370, 1999.
L. C. Kimerling, “Silicon materials engineering for the next millennium”, Solid State Phenomena, vol. 70. pp. 131-140, 1999.
A. M. Agarwal et al., Defect engineering for silicon microphotonics, vol. 99. 1999.

1998

T. Gregorkiewicz et al., “Excitation mechanism of Er in Si studied with a free-electron laser”, Journal of Luminescence, vol. 80. pp. 291-295, 1998.
G. J. Norga, Platero, M., Black, K. A., Reddy, A. J., Michel, J., and Kimerling, L. C., “Detection of metallic contaminants on silicon by surface sensitive minority carrier lifetime measurements”, Journal of the Electrochemical Society, vol. 145. pp. 2602-2607, 1998.
B. E. Little, Haus, H. A., Foresi, J. S., Kimerling, L. C., Ippen, E. P., and Ripin, D. J., “Wavelength switching and routing using absorption and resonance”, Ieee Photonics Technology Letters, vol. 10. pp. 816-818, 1998.
E. A. Fitzgerald and Kimerling, L. C., “Silicon-based microphotonics and integrated optoelectronics”, Mrs Bulletin, vol. 23. pp. 39-47, 1998.
B. E. Little et al., “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters”, Ieee Photonics Technology Letters, vol. 10. pp. 549-551, 1998.
A. L. Smith, Ahn, S. H., and Kimerling, L. C., A gettering simulator: Polished wafers and p/p(++) epilayers. 1998.
L. M. Giovane et al., “Materials for monolithic silicon microphotonics”, in Materials and Devices for Silicon-Based Optoelectronics, vol. 486, 1998, pp. 45-56.
S. Zhao and Kimerling, L. C., “Defect reactions induced by reactive ion etching”, in Semiconductor Process and Device Performance Modelling, vol. 490, 1998, pp. 123-128.
J. Michel, Assali, L. V. C., Morse, M. T., and Kimerling, L. C., “Erbium in silicon”, Light Emission in Silicon: From Physics to Devices, vol. 49. pp. 111-156, 1998.
T. D. Chen et al., “Erbium-doped silicon light emitting devices”, in Light-Emitting Diodes: Research, Manufacturing, and Applications Ii, vol. 3279, 1998, pp. 136-145.

1997

J. S. Foresi et al., “Photonic-bandgap microcavities in optical waveguides”, Nature, vol. 390. pp. 143-145, 1997.
G. J. Norga, Platero, M., Black, K. A., Reddy, A. J., Michel, J., and Kimerling, L. C., “Mechanism of copper deposition on silicon from dilute hydrofluoric acid solution”, Journal of the Electrochemical Society, vol. 144. pp. 2801-2810, 1997.
L. M. Giovane, Liao, L., Lim, D. R., Agarwal, A. M., Fitzgerald, E. A., and Kimerling, L. C., Si0.5Ge0.5 relaxed buffer photodetectors and low-loss polycrystalline silicon waveguides for integrated optical interconnects at lambda=1.3 mu m, vol. 3007. 1997.
L. C. Kimerling, Silicon for photonics, vol. 3002. 1997.
A. J. Reddy, Burr, T. A., Chan, J. K., Norga, G. J., Michel, J., and Kimerling, L. C., “Silicon surface defects: The roles of passivation and surface contamination”, in Defects in Semiconductors - Icds-19, Pts 1-3, vol. 258-2, 1997, pp. 1719-1724.
J. S. Foresi et al., Small radius bends and large angle splitters in SOI waveguides, vol. 3007. 1997.
X. Duan, PALM, J., Zheng, B., Morse, M., Michel, J., and Kimerling, L. C., “Defects in erbium/oxygen implanted silicon”, in Defects in Electronic Materials Ii, vol. 442, 1997, pp. 249-254.
S. H. Ahn et al., Electrical study of crystalline silicon coimplanted with erbium and oxygen, vol. 3007. 1997.
J. Michel et al., “Energy transfer processes at erbium ions in silicon”, in Defects in Semiconductors - Icds-19, Pts 1-3, vol. 258-2, 1997, pp. 1485-1489.
S. H. Ahn et al., “Gettering of Fe by aluminum in p-type Cz silicon”, in Defects in Electronic Materials Ii, vol. 442, 1997, pp. 169-174.
J. Michel, Reddy, A. J., Norga, G. J., Platero, M., and Kimerling, L. C., In-situ determination of Si wafer contamination using photoconductance decay measurements, vol. 97. 1997.
A. J. Reddy et al., “In-situ monitoring of HF reprocessing in an industrial scale recirculator bath”, in Environmental, Safety, and Health Issues in Ic Production, vol. 447, 1997, pp. 3-8.
S. Zhao, Agarwal, A. M., Benton, J. L., Gilmer, G. H., and Kimerling, L. C., “Interstitial defect reactions in silicon”, in Defects in Electronic Materials Ii, vol. 442, 1997, pp. 231-236.
S. Zhao et al., “Iron in p-type silicon: A comprehensive model”, in Defects in Semiconductors - Icds-19, Pts 1-3, vol. 258-2, 1997, pp. 429-436.
L. C. Kimerling, Kolenbrander, K. D., Michel, J., and PALM, J., “Light emission from silicon”, in Solid State Physics - Advances in Research and Applications, Vol 50, vol. 50, 1997, pp. 333-381.

1996

J. PALM, Gan, F., Zheng, B., Michel, J., and Kimerling, L. C., “Electroluminescence of erbium-doped silicon”, Physical Review B, vol. 54. pp. 17603-17615, 1996.
A. M. Agarwal, Liao, L., Foresi, J. S., Black, M. R., Duan, X. M., and Kimerling, L. C., “Low-loss polycrystalline silicon waveguides for silicon photonics”, Journal of Applied Physics, vol. 80. pp. 6120-6123, 1996.
J. S. Foresi, Black, M. R., Agarwal, A. M., and Kimerling, L. C., “Losses in polycrystalline silicon waveguides”, Applied Physics Letters, vol. 68. pp. 2052-2054, 1996.
J. Michel, Zheng, B., PALM, J., Ouellette, E., Gan, F., and Kimerling, L. C., “Erbium doped silicon for light emitting devices”, in Rare Earth Doped Semiconductors Ii, vol. 422, 1996, pp. 317-324.
L. Chalfoun, Norga, G., Zhao, S., and Kimerling, L. C., “In-line materials quality monitor for crystalline silicon solar cell fabrication”, in 13th Nrel Photovoltaics Program Review, 1996, pp. 535-544.
L. C. Kimerling, Michel, J., MSAAD, H., and Norga, G. J., Microdefect analysis of silicon: Tools and strategies. 1996.
J. PALM, Gan, F., and Kimerling, L. C., Nonradiative energy back transfer from erbium in silicon by impurity Auger process, vol. 2706. 1996.
A. M. Agarwal, Black, M. R., Foresi, J. S., Liao, L., Liu, Y. P., and Kimerling, L. C., “Polysilicon waveguides for silicon photonics”, in Polycrystalline Thin Films: Structure, Texture, Properties, and Applications Ii, vol. 403, 1996, pp. 327-332.
M. Morse, Zheng, B., PALM, J., Duan, X., and Kimerling, L. C., “Properties of ion implanted and UHV-CVD grown Si:Er”, in Rare Earth Doped Semiconductors Ii, vol. 422, 1996, pp. 41-46.
A. Thilderkvist, Michel, J., Ngiam, S. T., Kimerling, L. C., and Kolenbrander, K. D., “Room temperature emission from erbium nanoparticles embedded in a silicon matrix”, in Surface/Interface and Stress Effects in Electronic Materials Nanostructures, vol. 405, 1996, pp. 265-270.

1995

H. MSAAD, Michel, J., REDDY, A., and Kimerling, L. C., “MONITORING AND OPTIMIZATION OF SILICON SURFACE QUALITY”, Journal of the Electrochemical Society, vol. 142. pp. 2833-2835, 1995.
G. J. NORGA and Kimerling, L. C., “METAL REMOVAL FROM SILICON SURFACES IN WET CHEMICAL-SYSTEMS”, Journal of Electronic Materials, vol. 24. pp. 397-404, 1995.
G. J. NORGA, BLACK, K. A., MSAAD, H., Michel, J., and Kimerling, L. C., “SIMULATION AND IN-SITU MONITORING OF METALLIC CONTAMINATION AND SURFACE ROUGHENING IN WET WAFER CLEANING SOLUTIONS”, Materials Science and Technology, vol. 11. pp. 90-93, 1995.
J. Michel et al., “Erbium in silicon: A defect system for optoelectronic integrated circuits”, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-, 1995, pp. 585-589.
G. J. Norga, Black, M. R., Black, K. A., MSAAD, H., Michel, J., and Kimerling, L. C., “High sensitivity detection of silicon surface reactions by photoconductance decay”, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-, 1995, pp. 1531-1536.
J. Michel, BLACK, M. R., NORGA, G. J., BLACK, K. A., MSAAD, H., and Kimerling, L. C., In-situ wafer contamination detection through RF-PCD measurements, vol. 2638. 1995.
K. Wada, Nakanishi, H., and Kimerling, L. C., “Reactivation of Si donors and Zn acceptors in plasma-irradiated GaAs by reverse BiAs annealing”, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-2, 1995, pp. 1401-1405.
S. Zhao, Assali, L. V. C., and Kimerling, L. C., “The structure and bonding of iron-acceptor pairs in silicon”, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-, 1995, pp. 1333-1337.
J. PALM and Kimerling, L. C., “Defects and future silicon technology”, in Defect and Impurity Engineered Semiconductors and Devices, vol. 378, 1995, pp. 703-711.
F. Gan, Assali, L. V. C., and Kimerling, L. C., “Electronic structure of erbium centers in silicon”, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-, 1995, pp. 579-583.

1994

B. Zheng, Michel, J., REN, F. Y. G., Kimerling, L. C., JACOBSON, D. C., and POATE, J. M., “ROOM-TEMPERATURE SHARP LINE ELECTROLUMINESCENCE AT LAMBDA=1.54-MU-M FROM”, Applied Physics Letters, vol. 64. pp. 2842-2844, 1994.
H. MSAAD, Michel, J., LAPPE, J. J., and Kimerling, L. C., “ELECTRONIC PASSIVATION OF SILICON SURFACES BY HALOGENS”, Journal of Electronic Materials, vol. 23. pp. 487-491, 1994.
H. MSAAD, NORGA, G. J., Michel, J., and Kimerling, L. C., “DEFECT MONITORING AND CONTROL FOR CRYSTALLINE SILICON PROCESSING”, in 12th Nrel Photovoltaic Program Review, 1994, pp. 471-477.
F. Y. G. REN, Michel, J., JACOBSON, D. C., POATE, J. M., and Kimerling, L. C., “FLUORINE-ENHANCED SI-ER LIGHT-EMISSION”, in Materials Synthesis and Processing Using Ion Beams, vol. 316, 1994, pp. 493-498.
J. Michel, REN, F. Y. G., Zheng, B., JACOBSON, D. C., POATE, J. M., and Kimerling, L. C., “THE PHYSICS AND APPLICATION OF SIER FOR LIGHT-EMITTING-DIODES”, in Proceedings of the 17th International Conference on Defects in Semiconductors, Pts 1-3: Icds-17, vol. 143-, 1994, pp. 707-713.

1993

I. N. YASSIEVICH and Kimerling, L. C., “THE MECHANISMS OF ELECTRONIC EXCITATION OF RARE-EARTH IMPURITIES IN SEMICONDUCTORS”, Semiconductor Science and Technology, vol. 8. pp. 718-727, 1993.
A. ROHATGI, WEBER, E. R., and Kimerling, L. C., “OPPORTUNITIES IN SILICON PHOTOVOLTAICS AND DEFECT CONTROL IN PHOTOVOLTAIC MATERIALS”, Journal of Electronic Materials, vol. 22. pp. 65-72, 1993.

1992

J. Michel, Fitzgerald, E. A., XIE, Y. H., SILVERMAN, P. J., Morse, M., and Kimerling, L. C., “PHOTOLUMINESCENCE INVESTIGATIONS OF GRADED, TOTALLY RELAXED GEXSI1-X STRUCTURES”, Journal of Electronic Materials, vol. 21. pp. 1099-1104, 1992.
H. KITAGAWA, Kimerling, L. C., and TANAKA, S., “IRON-RELATED LEVELS IN NORMAL-TYPE SILICON STUDIED BY HALL-EFFECT AND DLTS MEASUREMENTS”, Journal of Electronic Materials, vol. 21. pp. 863-865, 1992.
J. L. BENTON, WEIR, B. E., EAGLESHAM, D. J., GOTTSCHO, R. A., Michel, J., and Kimerling, L. C., “MEASUREMENT OF DEFECT PROFILES IN REACTIVE ION ETCHED SILICON”, Journal of Vacuum Science & Technology B, vol. 10. pp. 540-543, 1992.
J. Michel et al., “DOPANT ENHANCEMENT OF THE 1.54 MU-M EMISSION OF ERBIUM IMPLANTED IN SILICON”, in Proceedings of the 16th International Conference on Defects in Semiconductors, Pts 1-3, vol. 83, 1992, pp. 653-658.

1991

L. C. Kimerling, “DEFECT ENGINEERING”, Mrs Bulletin, vol. 16. pp. 42-47, 1991.

1975

L. C. Kimerling, DEANGELIS, H. M., and DIEBOLD, J. W., “ROLE OF DEFECT CHARGE STATE IN STABILITY OF POINT-DEFECTS IN SILICON”, Solid State Communications, vol. 16. pp. 171-174, 1975.