Jurgen Michel

  • Senior Lecturer
  • Senior Research Associate, Materials Research Laboratories
  • PhD, Dr. habil

Photonic Materials

Jurgen Michel

Research

Jurgen Michel leads research projects in silicon-based photonic materials and devices as well as advanced solar cell designs.  His main focus is currently on on-chip WDM devices, Ge-based high performance detectors and modulators, and Ge-based lasers with the goal to implement active photonics devices in CMOS based chips.

Prior to joining MIT in 1991 he was Postdoctoral Member of Technical Staff at AT&T Bell Laboratories, studying defect reactions and defect properties in semiconductor materials.  He was educated in Germany and earned his diploma in Physics at the University of Cologne and his doctorate and habilitation in Applied Physics at the University of Paderborn. He has published more than 300 refereed scientific papers, 5 book chapters, 28 awarded patents, and more than 20 pending patents.

Recent News

Boosting Power at the Substrate

May 20, 2016

Jurgen Michek, Senior Research Associate at the Materials Processing Center, is working on improving photonic and solar cells materials and devices through inventing a new kind of semiconductor chip utilizing germanium.  …  

Publications

2020

T. Gu et al., “Guest Editorial: Special Issue on Optical Interconnects”, Journal of Lightwave Technology, vol. 38, no. 13. Institute of Electrical and Electronics Engineers (IEEE), pp. 3319-3321, 2020.

2018

Y. Wang et al., “Performance of AlGaInP LEDs on silicon substrates through low threading dislocation density (TDD) germanium buffer layer”, Semiconductor Science and Technology, vol. 33. p. 104004, 2018.
L. He et al., “Broadband athermal waveguides and resonators for datacom and telecom applications”, Photonics Research, vol. 6. p. 987, 2018.
J. Wang et al., “Robust cavity soliton formation with hybrid dispersion”, Photonics Research, vol. 6. p. 647, 2018.
L. Zhang et al., “Towards on-chip spectroscopy based on a single microresonator”, in 2017 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices, Beijing, China, 2018, p. 59.
T. W. Kim, Albert, B. R., Kimerling, L. C., and Michel, J., “InGaP solar cell on Ge-on-Si virtual substrate for novel solar power conversion”, Journal of Applied Physics, vol. 123. p. 085111, 2018.
Y. Guo et al., “Two-octave dispersion flattening with five zero-dispersion wavelengths in the mid-IR”, in Photonic and Phononic Properties of Engineered Nanostructures VIII, San Francisco, United States, 2018, p. 88.
J. Wang et al., “Agile generation of microresonator-based frequency combs without pump detuning and local temperature controlling”, in Laser Resonators, Microresonators, and Beam Control XX, San Francisco, United States, 2018, p. 18.
L. He et al., “Broadband athermal waveguides and devices for datacom and telecom applications”, in Silicon Photonics XIII, San Francisco, United States, 2018, p. 64.
Y. Guo et al., “Power-efficient generation of two-octave mid-IR frequency combs in a germanium microresonator”, Nanophotonics, vol. 7. pp. 1461-1467, 2018.
Y. Wang et al., “High-performance AlGaInP light-emitting diodes integrated on silicon through a superior quality germanium-on-insulator”, Photonics Research, vol. 6. p. 290, 2018.
C. Monmeyran et al., “Improved retention of phosphorus donors in germanium using a non-amorphizing fluorine co-implantation technique”, Journal of Applied Physics, vol. 123. p. 161524, 2018.
D. Pastor et al., “High level active tn+ doping of strained germanium through co-implantation and nanosecond pulsed laser melting”, Journal of Applied Physics, vol. 123. p. 165101, 2018.
D. Li et al., “Spectrum Splitting Micro-Concentrator Assembly for Laterally-arrayed Multi-Junction Photovoltaic Module”, in Conference on Lasers and Electro-Optics, San Jose, California, 2018, p. AW3O.3.

2017

S. Bao et al., “Germanium-on-insulator virtual substrate for InGaP epitaxy”, Materials Science in Semiconductor Processing, vol. 70. pp. 17-23, 2017.
K. H. Lee et al., “Hetero-epitaxy of high quality germanium film on silicon substrate for optoelectronic integrated circuit applications”, Journal of Materials Research, vol. 32. pp. 4025-4040, 2017.
L. Zhang, Tian, H., Liu, H., Li, G., Kimerling, L., and Michel, J., “Multipath Trapping Dynamics of Nanoparticles towards an Integrated Silicon Slot Waveguide”, in Proceedings of The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, 2017, p. 4407.
S. Bao et al., “Germanium-on-insulator virtual substrate for InGaP epitaxy”, Materials Science in Semiconductor Processing, vol. 58. pp. 15-21, 2017.
H. Tian, Kimerling, L. C., Michel, J., Li, G., and Zhang, L., “Multipath trapping dynamics of nanoparticles towards an integrated waveguide with a high index contrast”, San Francisco, California, United States, 2017, p. 100610P.
B. Wang et al., “The integration of InGaP LEDs with CMOS on 200 mm silicon wafers”, San Francisco, California, United States, 2017, p. 101070Y.
B. Wang et al., “Control wafer bow of InGaP on 200 mm Si by strain engineering”, Semiconductor Science and Technology, vol. 32. p. 125013, 2017.
J. Wang et al., “Robust generation of frequency combs in a microresonator with strong and narrowband loss”, Photonics Research, vol. 5. p. 552, 2017.
J. Wang et al., “Robust generation of frequency combs in a microresonator with strong and narrowband loss”, Photonics Research, vol. 5. pp. 552-556, 2017.
L. He et al., “Loss reduction of silicon-on-insulator waveguides for deep mid-infrared applications”, Optics Letters, vol. 42. pp. 3454-3457, 2017.
M. Yang et al., “Mid-IR supercontinuum generated in low-dispersion Ge-on-Si waveguides pumped by sub-ps pulses”, Optics Express, vol. 25. pp. 16116-16122, 2017.
C. Monmeyran, Crowe, I. F., Gwilliam, R. M., Michel, J., Kimerling, L. C., and Agarwal, A. M., “Strategies for increased donor electrical activity in germanium (opto-) electronic materials: a review”, International Materials Reviews, vol. 62. pp. 334-347, 2017.
B. Wang et al., “The integration of InGaP LEDs with CMOS on 200 mm Silicon wafers”, in Smart Photonic and Optoelectronic Integrated Circuits Xix, vol. 10107, Bellingham: Spie-Int Soc Optical Engineering, 2017, p. UNSP - 101070Y.
H. Tian, Kimerling, L. C., Michel, J., Li, G., and Zhang, L., “Multipath Trapping Dynamics of Nanoparticles towards an Integrated Waveguide with a High Index Contrast”, in Microfluidics, Biomems, and Medical Microsystems XV, vol. 10061, Bellingham: SPIE-Int Soc Optical Engineering, 2017, p. UNSP - 100610P.
H. Tian, Kimerling, L. C., Michel, J., Li, G., and Zhang, L., “Dynamics of Nanoparticles Trapped on an Integrated Slot Waveguide with a High Index Contrast”, in Optics in the Life Sciences Congress, San Diego, California, 2017, p. OtS1D.4.

2016

Y. Guo et al., “Bilayer dispersion-flattened waveguides with four zero-dispersion wavelengths”, Optics Letters, vol. 41. pp. 4939-4942, 2016.
Z. Jafari, Zhang, L., Agarwal, A. M., Kimerling, L. C., Michel, J., and Zarifkar, A., “Parameter Space Exploration in Dispersion Engineering of Multilayer Silicon Waveguides from Near-Infrared to Mid-Infrared”, Journal of Lightwave Technology, vol. 34. pp. 3696-3702, 2016.
B. Wang et al., “Direct MOCVD epitaxy of GaAsP on SiGe virtual substrate without growth of SiGe”, Journal of Crystal Growth, vol. 441. pp. 78-83, 2016.
C. Bao et al., “Effect of a breather soliton in Kerr frequency combs on optical communication systems”, Optics Letters, vol. 41. pp. 1764-1767, 2016.
K. H. Lee et al., “Reduction of threading dislocation density in Ge/Si using a heavily As-doped Ge seed layer”, Aip Advances, vol. 6. p. 025028, 2016.
B. S. Pearson, Kimerling, L. C., and Michel, J., “Germanium Photodetectors on Amorphous Substrates for Electronic-Photonic Integration”, in 2016 Ieee 13th International Conference on Group Iv Photonics (gfp), New York: Ieee, 2016, pp. 20-21.
L. He et al., “Low-loss SOI Waveguides at Mid-IR Wavelengths (4800 nm) Using the Second-order TE Mode”, in 2016 Ieee 13th International Conference on Group Iv Photonics (gfp), New York: Ieee, 2016, pp. 158-159.
M. Yang et al., “Mid-infrared Supercontinuum Generation in a Low-dispersion Ge-on-Si Waveguide Using Sub-picosecond Pulses”, in 2016 Ieee 13th International Conference on Group Iv Photonics (gfp), New York: Ieee, 2016, pp. 36-37.
Y. Guo et al., “Mid-IR Kerr Frequency Comb Generation from 4000 to 10000 nm in a CMOS-compatible Germanium Microcavity”, in 2016 Conference on Lasers and Electro-Optics (cleo), New York: Ieee, 2016.
B. Wang et al., “Red InGaP light-emitting diodes epitaxially grown on engineered Ge-on-Si substrates”, in Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting Xx, vol. 9768, Bellingham: Spie-Int Soc Optical Engineering, 2016, p. 97681J.
J. Wang et al., “Robust Generation of Kerr Frequency Combs with Strong and Localized Spectral Loss”, in 2016 Ieee 13th International Conference on Group Iv Photonics (gfp), New York: Ieee, 2016, pp. 153-154.

2015

C. Bao, Zhang, L., Kimerling, L. C., Michel, J., and Yang, C., “Soliton breathing induced by Stimulated Raman scattering and self-steepening in octave-spanning Kerr frequency comb generation”, Optics Express, vol. 23. pp. 18665-18670, 2015.
L. Z. Broderick, Albert, B. R., Pearson, B. S., Kimerling, L. C., and Michel, J., “Design for energy: Modeling of spectrum, temperature and device structure dependences of solar cell energy production”, Solar Energy Materials and Solar Cells, vol. 136. pp. 48-63, 2015.
C. Bao et al., “Increased bandwidth with flattened and low dispersion in a horizontal double-slot silicon waveguide”, Journal of the Optical Society of America B-Optical Physics, vol. 32. pp. 26-30, 2015.

2014

C. Bao et al., “Nonlinear conversion efficiency in Kerr frequency comb generation”, Optics Letters, vol. 39. pp. 6126-6129, 2014.
L. Zhang, Agarwal, A. M., Kimerling, L. C., and Michel, J., “Nonlinear Group IV photonics based on silicon and germanium: from near-infrared to mid-infrared”, Nanophotonics, vol. 3. pp. 247-268, 2014.
J. Mu, Soref, R., Kimerling, L. C., and Michel, J., “Silicon-on-nitride structures for mid-infrared gap-plasmon waveguiding”, Applied Physics Letters, vol. 104. 2014.
L. Zhang, Agarwal, A. M., Kimerling, L. C., and Michel, J., “Two-cycle pulse generation from mode-locked Kerr frequency combs based on an integrated dispersion-flattened micro-resonator”, Laser Resonators, Microresonators, and Beam Control Xvi, vol. 8960. 2014.
Y. Cai, Yu, W., Kimerling, L. C., and Michel, J., “Chemical Mechanical Polishing of Selective Epitaxial Grown Germanium on Silicon”, Ecs Journal of Solid State Science and Technology, vol. 3. pp. P5 - P9, 2014.

2013

H. Lin, Ogbuu, O., Liu, J., Zhang, L., Michel, J., and Hu, J., “Breaking the Energy-Bandwidth Limit of Electrooptic Modulators: Theory and a Device Proposal”, Journal of Lightwave Technology, vol. 31. pp. 4029-4036, 2013.
S. Grillanda et al., “Post-fabrication trimming of athermal silicon waveguides”, Optics Letters, vol. 38. pp. 5450-5453, 2013.
L. Zhang et al., “Generation of two-cycle pulses and octave-spanning frequency combs in a dispersion-flattened micro-resonator”, Optics Letters, vol. 38. pp. 5122-5125, 2013.
J. P. Singer, Lin, P. -T., Kooi, S. E., Kimerling, L. C., Michel, J., and Thomas, E. L., “Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient”, Advanced Materials, vol. 25. pp. 6100-6105, 2013.
J. Mu, Chen, L., Li, X., Huang, W. -P., Kimerling, L. C., and Michel, J., “Hybrid nano ridge plasmonic polaritons waveguides”, Applied Physics Letters, vol. 103. 2013.
Y. Cai et al., “Analysis of Threshold Current Behavior for Bulk and Quantum-Well Germanium Laser Structures”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 19. 2013.
J. Mu et al., “Towards ultra-subwavelength optical latches”, Applied Physics Letters, vol. 103. 2013.
J. Mu et al., “Design and fabrication of a high transmissivity metal-dielectric ultraviolet band-pass filter”, Applied Physics Letters, vol. 102. 2013.
R. Camacho-Aguilera, Han, Z., Cai, Y., Kimerling, L. C., and Michel, J., “Direct band gap narrowing in highly doped Ge”, Applied Physics Letters, vol. 102. 2013.
X. Wang, Kimerling, L. C., Michel, J., and Liu, J., “Large inherent optical gain from the direct gap transition of Ge thin films”, Applied Physics Letters, vol. 102. 2013.
X. Wang et al., “Infrared absorption of n-type tensile-strained Ge-on-Si”, Optics Letters, vol. 38. pp. 652-654, 2013.
J. Mu, Ragunathan, V., Zhang, L., Okamoto, S., Kimerling, L. C., and Michel, J., “Development of a chip-to-chip optical interconnect system”, 2013 Ieee Optical Interconnects Conference. pp. 116-117, 2013.
L. C. Kimerling and Michel, J., The Ge-on-Si Integrated Microphotonic Platform. 2013.
L. Z. Broderick, Albert, B. R., Pearson, B. S., Kimerling, L. C., and Michel, J., “Solar spectral variations and their influence on concentrator solar cell performance”, High and Low Concentrator Systems for Solar Electric Applications Viii, vol. 8821. p. UNSP - 88210I, 2013.

2012

L. Zhang et al., “On-Chip Octave-Spanning Supercontinuum in Nanostructured Silicon Waveguides Using Ultralow Pulse Energy”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 18. pp. 1799-1806, 2012.
R. E. Camacho-Aguilera, Cai, Y., Bessette, J. T., Kimerling, L. C., and Michel, J., “High active carrier concentration in n-type, thin film Ge using delta-doping”, Optical Materials Express, vol. 2. pp. 1462-1469, 2012.
V. Raghunathan, Yaguee, J. L., Xu, J., Michel, J., Gleason, K. K., and Kimerling, L. C., “Co-polymer clad design for high performance athermal photonic circuits”, Optics Express, vol. 20. pp. 20808-20813, 2012.
J. Liu, Kimerling, L. C., and Michel, J., “Monolithic Ge-on-Si lasers for large-scale electronic-photonic integration”, Semiconductor Science and Technology, vol. 27. 2012.
Y. Cai, Camacho-Aguilera, R., Bessette, J. T., Kimerling, L. C., and Michel, J., “High phosphorous doped germanium: Dopant diffusion and modeling”, Journal of Applied Physics, vol. 112. 2012.
V. Raghunathan, Izuhara, T., Michel, J., and Kimerling, L. C., “Stability of polymer-dielectric bi-layers for athermal silicon photonics”, Optics Express, vol. 20. pp. 16059-16066, 2012.
X. Sheng, Hu, J., Michel, J., and Kimerling, L. C., “Light trapping limits in plasmonic solar cells: an analytical investigation”, Optics Express, vol. 20. pp. A496 - A501, 2012.
R. E. Camacho-Aguilera et al., “An electrically pumped germanium laser”, Optics Express, vol. 20. pp. 11316-11320, 2012.
B. Wang et al., “Photoluminescence quantum efficiency and energy transfer of ErRE silicate (RE = Y, Yb) thin films”, Journal of Physics D-Applied Physics, vol. 45. 2012.
M. Stefancich et al., “Single element spectral splitting solar concentrator for multiple cells CPV system”, Optics Express, vol. 20. pp. 9004-9018, 2012.
X. Sheng, Johnson, S. G., Broderick, L. Z., Michel, J., and Kimerling, L. C., “Integrated photonic structures for light trapping in thin-film Si solar cells”, Applied Physics Letters, vol. 100. 2012.
K. A. McComber, Duan, X., Liu, J., Michel, J., and Kimerling, L. C., “Single-Crystal Germanium Growth on Amorphous Silicon”, Advanced Functional Materials, vol. 22. pp. 1049-1057, 2012.
J. Liu et al., “Ge-on-Si optoelectronics”, Thin Solid Films, vol. 520. pp. 3354-3360, 2012.
P. T. Lin et al., “Engineering broadband and anisotropic photoluminescence emission from rare earth doped tellurite thin film photonic crystals”, Optics Express, vol. 20. pp. 2124-2135, 2012.
G. Kurian et al., “Cross-layer Energy and Performance Evaluation of a Nanophotonic Manycore Processor System using Real Application Workloads”, 2012 Ieee 26th International Parallel and Distributed Processing Symposium (ipdps). pp. 1117-1130, 2012.
Y. Cai, Camacho-Aguilera, R., Bessette, J. T., Kimerling, L. C., and Michel, J., “Dopant Enhanced Diffusion For High n-type Doped Ge”, Sige, Ge, and Related Compounds 5: Materials, Processing, and Devices, vol. 50. pp. 263-266, 2012.
R. Camacho-Aguilera, Cai, Y., Kimerling, L. C., and Michel, J., “Ge-on-Si Bufferless Epitaxial Growth for Photonic Devices”, Sige, Ge, and Related Compounds 5: Materials, Processing, and Devices, vol. 50. pp. 469-473, 2012.
L. Zhang, Lin, Q., Agarwal, A. M., Kimerling, L. C., and Michel, J., “On-Chip Sub-Cycle Pulse Generation via a Two-Octave Supercontinuum from Visible to Mid-Infrared Wavelengths”, 2012 Conference on Lasers and Electro-Optics (cleo). 2012.

2011

D. Ahn, Kimerling, L. C., and Michel, J., “Efficient evanescent wave coupling conditions for waveguide-integrated thin-film Si/Ge photodetectors on silicon-on-insulator/germanium-on-insulator substrates”, Journal of Applied Physics, vol. 110. 2011.
X. Sheng et al., “Design and fabrication of high-index-contrast self-assembled texture for light extraction enhancement in LEDs”, Optics Express, vol. 19. pp. A701 - A709, 2011.
X. Sheng, Johnson, S. G., Michel, J., and Kimerling, L. C., “Optimization-based design of surface textures for thin-film Si solar cells”, Optics Express, vol. 19. pp. A841 - A850, 2011.
X. Sheng, Liu, J., Kozinsky, I., Agarwal, A. M., Michel, J., and Kimerling, L. C., “Design and Non-Lithographic Fabrication of Light Trapping Structures for Thin Film Silicon Solar Cells”, Advanced Materials, vol. 23. p. 843 - +, 2011.
L. C. Kimerling and Michel, J., “Monolithic Microphotonic Integration on the Silicon Platform”, Ulsi Process Integration 7, vol. 41. pp. 3-13, 2011.
J. Michel, Liu, J., Kimerling, L. C., Camacho-Aguilera, R., Bessette, J. T., and Cai, Y., “A Germanium-on-Silicon Laser for On-chip Applications”, 2011 Conference on Lasers and Electro-Optics (cleo). 2011.

2010

D. Ahn, Kimerling, L. C., and Michel, J., “Evanescent Coupling Device Design for Waveguide-Integrated Group IV Photodetectors”, Journal of Lightwave Technology, vol. 28. pp. 3387-3394, 2010.
K. -Y. Tu et al., “Silicon RF-Photonic Filter and Down-Converter”, Journal of Lightwave Technology, vol. 28. pp. 3019-3028, 2010.
X. Sheng, Liu, J., Coronel, N., Agarwal, A. M., Michel, J., and Kimerling, L. C., “Integration of Self-Assembled Porous Alumina and Distributed Bragg Reflector for Light Trapping in Si Photovoltaic Devices”, Ieee Photonics Technology Letters, vol. 22. pp. 1394-1396, 2010.
V. Raghunathan, Ye, W. N., Hu, J., Izuhara, T., Michel, J., and Kimerling, L. C., “Athermal operation of Silicon waveguides: spectral, second order and footprint dependencies”, Optics Express, vol. 18. pp. 17631-17639, 2010.
J. Michel, Liu, J., and Kimerling, L. C., “High-performance Ge-on-Si photodetectors”, Nature Photonics, vol. 4. pp. 527-534, 2010.
D. Underwood et al., “New optical technology for low mass intelligent trigger and readout”, Journal of Instrumentation, vol. 5. 2010.
J. Liu, Sun, X., Camacho-Aguilera, R., Kimerling, L. C., and Michel, J., “Ge-on-Si laser operating at room temperature”, Optics Letters, vol. 35. pp. 679-681, 2010.
X. Sun, Liu, J., Kimerling, L. C., and Michel, J., “Toward a Germanium Laser for Integrated Silicon Photonics”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 16. pp. 124-131, 2010.
J. Liu, Sun, X., Camacho-Aguilera, R., Cai, Y., Kimerling, L. C., and Michel, J., Optical Gain and Lasing from Band-Engineered Ge-on-Si at Room Temperature. 2010.
G. Kurian et al., ATAC: A 1000-Core Cache-Coherent Processor with On-Chip Optical Network. 2010.
J. Liu, Sun, X., Camacho-Aguilera, R., Kimerling, L. C., and Michel, J., “Band-Engineered Ge-on-Si Lasers for Integrated Photonics”, Sige, Ge, and Related Compounds 4: Materials, Processing, and Devices, vol. 33. pp. 539-543, 2010.
X. Sheng, Liu, J., Kozinsky, I., Agarwal, A. M., Michel, J., and Kimerling, L. C., “Efficient Light Trapping Structure in Thin Film Silicon Solar Cells”, 35th Ieee Photovoltaic Specialists Conference. pp. 1575-1576, 2010.
M. Vanhoutte, Wang, B., Zhou, Z., Michel, J., and Kimerling, L. C., “Direct demonstration of sensitization at 980nm optical excitation in erbium-ytterbium silicates”, 2010 7th Ieee International Conference on Group Iv Photonics (gfp). pp. 308-310, 2010.
K. A. McComber, Liu, J., Michel, J., and Kimerling, L. C., “Low-temperature germanium ultra-high vacuum chemical vapor deposition for back-end photonic device integration”, 2010 7th Ieee International Conference on Group Iv Photonics (gfp). pp. 57-59, 2010.
J. Liu, Sun, X., Camacho-Aguilera, R., Cai, Y., Kimerling, L. C., and Michel, J., “Monolithic Ge-on-Si Lasers for Integrated Photonics”, 2010 7th Ieee International Conference on Group Iv Photonics (gfp). pp. 1-3, 2010.

2009

R. Sun, Cheng, J., Michel, J., and Kimerling, L. C., “Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process”, Optics Letters, vol. 34. pp. 2378-2380, 2009.
X. Sun, Liu, J., Kimerling, L. C., and Michel, J., “Direct gap photoluminescence of n-type tensile-strained Ge-on-Si”, Applied Physics Letters, vol. 95. 2009.
M. S. Rasras et al., “Demonstration of a Tunable Microwave-Photonic Notch Filter Using Low-Loss Silicon Ring Resonators”, Journal of Lightwave Technology, vol. 27. pp. 2105-2110, 2009.
J. Liu, Sun, X., Kimerling, L. C., and Michel, J., “Direct-gap optical gain of Ge on Si at room temperature”, Optics Letters, vol. 34. pp. 1738-1740, 2009.
X. Sun, Liu, J., Kimerling, L. C., and Michel, J., “Room-temperature direct bandgap electroluminesence from Ge-on-Si light-emitting diodes”, Optics Letters, vol. 34. pp. 1198-1200, 2009.
J. Liu et al., “Efficient above-band-gap light emission in germanium”, Chinese Optics Letters, vol. 7. pp. 271-273, 2009.
R. Sun et al., “Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer”, Applied Physics Letters, vol. 94. 2009.
S. Saini, Hong, C. -Y., Bernardis, S., Pfaff, N., Kimerling, L. C., and Michel, J., “Hybrid waveguides for optically pumped amplifiers”, Applied Physics Letters, vol. 94. 2009.
D. Ahn, Hong, C. -yin, Kimerling, L. C., and Michel, J., “Coupling efficiency of monolithic, waveguide-integrated Si photodetectors”, Applied Physics Letters, vol. 94. 2009.
L. C. Kimerling et al., Si-Rich Dielectrics for Active Photonic Devices. 2009.
X. Sun, Liu, J., Kimerling, L. C., and Michel, J., A Ge-on-Si Laser for Electronic-Photonic Integration. 2009.
J. Liu, Beals, M. A., Michel, J., and Kimerling, L. C., “Light up the Future of Silicon Microprocessors”, in Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based Cmos 5: New Materials, Processes, and Equipment, vol. 19, 2009, pp. 17-28.
X. Sheng, Liu, J., Michel, J., Agarwal, A. M., and Kimerling, L. C., “LOW-COST, DETERMINISTIC QUASI-PERIODIC PHOTONIC STRUCTURES FOR LIGHT TRAPPING IN THIN FILM SILICON SOLAR CELLS”, in 2009 34th Ieee Photovoltaic Specialists Conference, Vols 1-3, 2009, pp. 2429-2432.

2008

S. Saini, Hong, C. -Y., Pfaff, N., Kimerling, L. C., and Michel, J., “Partial confinement photonic crystal waveguides”, Applied Physics Letters, vol. 93. 2008.
R. Sun et al., “Theoretical modeling on hydrogen evolution in ultraviolet light-treated hydrogenated silicon nitride”, Journal of Applied Physics, vol. 104. 2008.
R. Sun et al., “Impedance matching vertical optical waveguide couplers for dense high index contrast circuits”, Optics Express, vol. 16. pp. 11682-11690, 2008.
J. Liu et al., “Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators”, Nature Photonics, vol. 2. pp. 433-437, 2008.
W. N. Ye, Michel, J., and Kimerling, L. C., “Athermal high-index-contrast waveguide design”, Ieee Photonics Technology Letters, vol. 20. pp. 885-887, 2008.
X. Sun, Liu, J., Kimerling, L. C., and Michel, J., “Optical Bleaching of Thin Film Ge on Si”, in Sige, Ge, and Related Compounds 3: Materials, Processing, and Devices, vol. 16, 2008, pp. 881-889.
W. N. Ye, Michel, J., Kimerling, L. C., and Eldada, L., “Polymer-cladded athermal high-index-contrast waveguides”, in Optoelectronic Integrated Circuits X, vol. 6897, 2008, pp. U103 - U110.
W. N. Ye, Sun, R., Michel, J., Eldada, L., Pant, D., and Kimerling, L. C., Thermo-optical Compensation in High-index-contrast Waveguides. 2008.
J. Liu, Sun, X., Becla, P., Kimerling, L. C., and Michel, J., Towards a Ge-based Laser for CMOS Applications. 2008.
J. Liu et al., Ultralow Energy, Integrated GeSi Electroabsorption Modulators on SOI. 2008.
M. A. Beals et al., “Process flow innovations for photonic device integration in CMOS - art. no. 689804”, in Silicon Photonics Iii, vol. 6898, 2008, pp. 89804-89804.

2007

R. Sun et al., “Horizontal single and multiple slot waveguides: optical transmission at lambda=1550 nm”, Optics Express, vol. 15. pp. 17967-17972, 2007.
D. D. Cannon et al., “Germanium-rich silicon-germanium films epitaxially grown by ultrahigh vacuum chemical-vapor deposition directly on silicon substrates”, Applied Physics Letters, vol. 91. 2007.
J. Liu et al., “Tensile-strained, n-type Ge as a gain medium for monolithic laser integration on Si”, Optics Express, vol. 15. pp. 11272-11277, 2007.
N. -N. Feng, Sun, R., Michel, J., and Kimerling, L. C., “Low-loss compact-size slotted waveguide polarization rotator and transformer”, Optics Letters, vol. 32. pp. 2131-2133, 2007.
N. -N. Feng et al., “Design of highly efficient light-trapping structures for thin-film crystalline silicon solar cells”, Ieee Transactions on Electron Devices, vol. 54. pp. 1926-1933, 2007.
M. Hiltunen, Dal Negro, L., Feng, N. -N., Kimerling, L. C., and Michel, J., “Modeling of aperiodic fractal waveguide structures for multifrequency light transport”, Journal of Lightwave Technology, vol. 25. pp. 1841-1847, 2007.
N. -N. Feng, Sun, R., Kimerling, L. C., and Michel, J., “Lossless strip-to-slot waveguide transformer”, Optics Letters, vol. 32. pp. 1250-1252, 2007.
R. Sun et al., “High performance asymmetric graded index coupler with integrated lens for high index waveguides”, Applied Physics Letters, vol. 90. 2007.
D. Ahn et al., “High performance, waveguide integrated Ge photodetectors”, Optics Express, vol. 15. pp. 3916-3921, 2007.
J. Liu, Pan, D., Jongthammanurak, S., Wada, K., Kimerling, L. C., and Michel, J., “Design of monolithically integrated GeSi electro-absorption modulators and photodetectors on an SOI platform”, Optics Express, vol. 15. pp. 623-628, 2007.
M. S. Rasras et al., “Demonstration of a fourth-order pole-zero optical filter integrated using CMOS processes”, Journal of Lightwave Technology, vol. 25. pp. 87-92, 2007.
J. Michel et al., “Advances in fully CMOS integrated photonic devices - art. no. 64770P”, in Silicon Photonics II, vol. 6477, 2007, pp. P4770 - P4770.
J. Liu et al., Ge-based active devices for Si photonics. 2007.

2006

L. Dal Negro et al., “Light-emitting silicon nanocrystals and photonic structures in silicon nitride”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 12. pp. 1628-1635, 2006.
L. Dal Negro et al., “Synthesis, characterization, and modeling of nitrogen-passivated colloidal and thin film silicon nanocrystals”, Ieee Journal of Selected Topics in Quantum Electronics, vol. 12. pp. 1151-1163, 2006.
S. Jongthammanurak et al., “Large electro-optic effect in tensile strained Ge-on-Si films”, Applied Physics Letters, vol. 89. 2006.
D. T. Danielson, Sparacin, D. K., Michel, J., and Kimerling, L. C., “Surface-energy-driven dewetting theory of silicon-on-insulator agglomeration”, Journal of Applied Physics, vol. 100. 2006.
N. -N. Feng, Michel, J., and Kimerling, L. C., “Optical field concentration in low-index waveguides”, Ieee Journal of Quantum Electronics, vol. 42. pp. 885-890, 2006.
F. Gan et al., “Design of all-optical switches based on carrier injection in Si/SiO2 split-ridge waveguides (SRWs)”, Journal of Lightwave Technology, vol. 24. pp. 3454-3463, 2006.
L. Dal Negro et al., “Light emission efficiency and dynamics in silicon-rich silicon nitride films”, Applied Physics Letters, vol. 88. 2006.
K. Wada, Ahn, D. H., Lim, D. R., Michel, J., and Kimerling, L. C., “Si microphotonics for optical interconnection”, Thin Solid Films, vol. 508. pp. 418-421, 2006.
V. Nguyen et al., “Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems”, Applied Physics Letters, vol. 88. 2006.
J. F. Liu et al., Waveguide integrated Ge p-i-n photodetectors on a silicon-on-insulator platform. 2006.
J. F. Liu et al., Waveguide-integrated Ge p-i-n photodetectors on SOI platform. 2006.
V. Nguyen et al., Asymmetric GRIN lensed single mode fiber-to-waveguide coupler. 2006.
F. X. Kartner et al., “Electronic photonic integrated circuits for high speed, high resolution, analog to digital conversion - art. no. 612503”, in Silicon Photonics, vol. 6125, 2006, pp. 12503-12503.
L. C. Kimerling et al., “Electronic-photonic integrated circuits on the CMOS platform - art. no. 612502”, in Silicon Photonics, vol. 6125, 2006, pp. 12502-12502.
L. Dal Negro, Yi, J. H., Koklu, H., Michel, J., and Kimerling, L. C., “Light emission from silicon-based nano-materials”, in 2006 IEEE LEOS Annual Meeting Conference Proceedings, Vols 1 and 2, 2006, pp. 544-544.
L. Dal Negro et al., “Light-emitting silicon-rich nitride systems and photonic structures”, Journal of Experimental Nanoscience, vol. 1. pp. 29-50, 2006.
D. K. Sparacin et al., Low loss amorphous silicon channel waveguides for integrated photonics. 2006.

2005

J. F. Liu et al., “High-performance, tensile-strained Ge p-i-n photodetectors on a Si platform”, Applied Physics Letters, vol. 87. 2005.
D. K. Sparacin, Hong, C. Y., Kimerling, L. C., Michel, J., Lock, J. P., and Gleason, K. K., “Trimming of microring resonators by photo-oxidation of a plasma-polymerized organosilane cladding material”, Optics Letters, vol. 30. pp. 2251-2253, 2005.
J. F. Liu et al., “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications”, Applied Physics Letters, vol. 87. 2005.
Y. Ishikawa et al., “Strain-induced enhancement of near-infrared absorption in Ge epitaxial layers grown on Si substrate”, Journal of Applied Physics, vol. 98. 2005.
L. Dal Negro, Yi, J. H., Nguyen, V., Yi, Y., Michel, J., and Kimerling, L. C., “Spectrally enhanced light emission from aperiodic photonic structures”, Applied Physics Letters, vol. 86. 2005.
M. Stolfi et al., “CMOS compatible erbium coupled Si nanocrystal thin films for microphotonics”, in Group-IV Semiconductor Nanostructures, vol. 832, 2005, pp. 373-377.
V. Nguyen et al., Compact 3dB single mode fiber-to-waveguide coupler. 2005.
L. Dal Negro, Stolfi, M., Michel, J., Le Blanc, J., Haavisto, J., and Kimerling, L. C., Energy sensitization in erbium-doped silicon-rich oxide films annealed at low temperatures. 2005.
J. Michel et al., High performance Ge p-i-n photodetectors on Si. 2005.
L. Dal Negro, Yi, J. H., Nguyen, V., Yi, Y., Michel, J., and Kimerling, L. C., “Light emission in aperiodic Thue-Morse dielectrics”, in Group-IV Semiconductor Nanostructures, vol. 832, 2005, pp. 15-20.
L. Dal Negro et al., Light emitting silicon nanostructures. 2005.
D. K. Sparacin, Lock, J. P., Hong, C. Y., Gleason, K. K., Kimerling, L. C., and Michel, J., Trimming of silicon nitride microring resonators with a polysilane top cladding. 2005.

2004

J. F. Liu et al., “Deformation potential constants of biaxially tensile stressed Ge epitaxial films on Si(100)”, Physical Review B, vol. 70. 2004.
S. Saini, Chen, K., Duan, X. M., Michel, J., Kimerling, L. C., and Lipson, M., “Er2O3 for high-gain waveguide amplifiers”, Journal of Electronic Materials, vol. 33. pp. 809-814, 2004.
L. Dal Negro et al., “Photon band gap properties and omnidirectional reflectance in Si/SiO2 Thue-Morse quasicrystals”, Applied Physics Letters, vol. 84. pp. 5186-5188, 2004.
D. D. Cannon et al., “Tensile strained epitaxial Ge films on Si(100) substrates with potential application in L-band telecommunications”, Applied Physics Letters, vol. 84. pp. 906-908, 2004.
J. F. Liu et al., “Silicidation-induced band gap shrinkage in Ge epitaxial films on Si”, Applied Physics Letters, vol. 84. pp. 660-662, 2004.
S. Saini et al., “A high index contrast silicon oxynitride materials platform for Er-doped microphotonic amplifiers”, in New Materials for Microphotonics, vol. 817, 2004, pp. 27-33.
L. C. Kimerling et al., “Monolithic Silicon Microphotonics”, Silicon Photonics, vol. 94. pp. 89-119, 2004.
L. Dal Negro et al., “Omnidirectional reflectance and optical gap properties of Si/SiO2 Thue-Morse quasicrystals”, in New Materials for Microphotonics, vol. 817, 2004, pp. 75-81.
J. F. Liu et al., “A 20GHz, tensile strained Ge photodetector on Si platform with broad detection spectrum for optical communications and on-chip applications”, in 2004 Ieee Leos Annual Meeting Conference Proceedings, Vols 1 and 2, 2004, pp. 150-151.
S. Akiyama, Wada, K., Michel, J., Kimerling, L. C., Popovic, M. A., and Haus, H. A., “Air trench waveguide bend for high density optical integration”, in Integrated Optics: Devices, Materials, and Technologies Viii, vol. 5355, 2004, pp. 14-21.

2003

S. Saini, Michel, J., and Kimerling, L. C., “Index contrast scaling for optical amplifiers”, Journal of Lightwave Technology, vol. 21. pp. 2368-2376, 2003.
D. D. Cannon et al., “Monolithic Si-based technology for optical receiver circuits”, in Quantum Sensing: Evolution and Revolution from Past to Future, vol. 4999, 2003, pp. 145-155.
D. D. Cannon et al., “Near-infrared Ge photodetectors fabricated on Si substrates with CMOS technology”, in Optoelectronics of Group-Iv-Based Materials, vol. 770, 2003, pp. 183-187.

2001

A. J. Reddy, Michel, J., and Kimerling, L. C., “Observation of two coupled defect levels on the hydrogen-passivated Si (100) surface”, Physica B-Condensed Matter, vol. 308. pp. 228-231, 2001.

2000

A. J. Reddy, Michel, J., Parekh, B., Shyu, J. H., and Kimerling, L. C., “In situ detection of trace levels of copper in hydrofluoric acid”, Journal of the Electrochemical Society, vol. 147. pp. 2337-2339, 2000.
M. Lipson et al., “Er3+-photon interaction”, Journal of Luminescence, vol. 87-9. pp. 323-325, 2000.
T. Gregorkiewicz et al., “Energy transfer between shallow centers and rare-earth ion cores: Er3+ ion in silicon”, Physical Review B, vol. 61. pp. 5369-5375, 2000.

1999

A. J. Reddy et al., “Defect states at silicon surfaces”, Physica B-Condensed Matter, vol. 273-4. pp. 468-472, 1999.
V. V. Emtsev et al., “Impurity effects in silicon implanted with rare-earth ions”, Physica B-Condensed Matter, vol. 273-4. pp. 346-349, 1999.
T. D. Chen, Platero, M., Opher-Lipson, M., PALM, J., Michel, J., and Kimerling, L. C., “The temperature dependence of radiative and nonradiative processes at Er-O centers in Si”, Physica B-Condensed Matter, vol. 273-4. pp. 322-325, 1999.
V. V. Emtsev et al., “Oxygen and Erbium related donor centers in Czochralski grown silicon implanted with erbium”, Semiconductors, vol. 33. pp. 1084-1087, 1999.
V. V. Emtsev et al., “Impurity centers in silicon doped with rare-earth impurities of dysprosium, holmium, erbium, and ytterbium”, Semiconductors, vol. 33. pp. 603-605, 1999.
K. Wada et al., “Photonic bandgap formation by wafer bonding and delamination”, in Iii-V and Iv-Iv Materials and Processing Challenges for Highly Integrated Microelectronics and Optoelectronics, vol. 535, 1999, pp. 121-126.
V. V. Emtsev et al., “Rare earth impurities and impurity-related centers in silicon”, Solid State Phenomena, vol. 70. pp. 365-370, 1999.
A. M. Agarwal et al., Defect engineering for silicon microphotonics, vol. 99. 1999.

1998

T. Gregorkiewicz et al., “Excitation mechanism of Er in Si studied with a free-electron laser”, Journal of Luminescence, vol. 80. pp. 291-295, 1998.
Y. Fink et al., “A dielectric omnidirectional reflector”, Science, vol. 282. pp. 1679-1682, 1998.
G. J. Norga, Platero, M., Black, K. A., Reddy, A. J., Michel, J., and Kimerling, L. C., “Detection of metallic contaminants on silicon by surface sensitive minority carrier lifetime measurements”, Journal of the Electrochemical Society, vol. 145. pp. 2602-2607, 1998.
J. Michel, Assali, L. V. C., Morse, M. T., and Kimerling, L. C., “Erbium in silicon”, Light Emission in Silicon: From Physics to Devices, vol. 49. pp. 111-156, 1998.
T. D. Chen et al., “Erbium-doped silicon light emitting devices”, in Light-Emitting Diodes: Research, Manufacturing, and Applications Ii, vol. 3279, 1998, pp. 136-145.
L. M. Giovane et al., “Materials for monolithic silicon microphotonics”, in Materials and Devices for Silicon-Based Optoelectronics, vol. 486, 1998, pp. 45-56.

1997

G. J. Norga, Platero, M., Black, K. A., Reddy, A. J., Michel, J., and Kimerling, L. C., “Mechanism of copper deposition on silicon from dilute hydrofluoric acid solution”, Journal of the Electrochemical Society, vol. 144. pp. 2801-2810, 1997.
J. Michel, Reddy, A. J., Norga, G. J., Platero, M., and Kimerling, L. C., In-situ determination of Si wafer contamination using photoconductance decay measurements, vol. 97. 1997.
A. J. Reddy et al., “In-situ monitoring of HF reprocessing in an industrial scale recirculator bath”, in Environmental, Safety, and Health Issues in Ic Production, vol. 447, 1997, pp. 3-8.
S. Zhao et al., “Iron in p-type silicon: A comprehensive model”, in Defects in Semiconductors - Icds-19, Pts 1-3, vol. 258-2, 1997, pp. 429-436.
L. C. Kimerling, Kolenbrander, K. D., Michel, J., and PALM, J., “Light emission from silicon”, in Solid State Physics - Advances in Research and Applications, Vol 50, vol. 50, 1997, pp. 333-381.
A. J. Reddy, Burr, T. A., Chan, J. K., Norga, G. J., Michel, J., and Kimerling, L. C., “Silicon surface defects: The roles of passivation and surface contamination”, in Defects in Semiconductors - Icds-19, Pts 1-3, vol. 258-2, 1997, pp. 1719-1724.
X. Duan, PALM, J., Zheng, B., Morse, M., Michel, J., and Kimerling, L. C., “Defects in erbium/oxygen implanted silicon”, in Defects in Electronic Materials Ii, vol. 442, 1997, pp. 249-254.
S. H. Ahn et al., Electrical study of crystalline silicon coimplanted with erbium and oxygen, vol. 3007. 1997.
J. Michel et al., “Energy transfer processes at erbium ions in silicon”, in Defects in Semiconductors - Icds-19, Pts 1-3, vol. 258-2, 1997, pp. 1485-1489.

1996

J. PALM, Gan, F., Zheng, B., Michel, J., and Kimerling, L. C., “Electroluminescence of erbium-doped silicon”, Physical Review B, vol. 54. pp. 17603-17615, 1996.
J. Michel, Zheng, B., PALM, J., Ouellette, E., Gan, F., and Kimerling, L. C., “Erbium doped silicon for light emitting devices”, in Rare Earth Doped Semiconductors Ii, vol. 422, 1996, pp. 317-324.
L. C. Kimerling, Michel, J., MSAAD, H., and Norga, G. J., Microdefect analysis of silicon: Tools and strategies. 1996.
A. Thilderkvist, Michel, J., Ngiam, S. T., Kimerling, L. C., and Kolenbrander, K. D., “Room temperature emission from erbium nanoparticles embedded in a silicon matrix”, in Surface/Interface and Stress Effects in Electronic Materials Nanostructures, vol. 405, 1996, pp. 265-270.

1995

H. MSAAD, Michel, J., REDDY, A., and Kimerling, L. C., “MONITORING AND OPTIMIZATION OF SILICON SURFACE QUALITY”, Journal of the Electrochemical Society, vol. 142. pp. 2833-2835, 1995.
G. J. NORGA, Black, K. A., MSAAD, H., Michel, J., and Kimerling, L. C., “SIMULATION AND IN-SITU MONITORING OF METALLIC CONTAMINATION AND SURFACE ROUGHENING IN WET WAFER CLEANING SOLUTIONS”, Materials Science and Technology, vol. 11. pp. 90-93, 1995.
J. Michel et al., “Erbium in silicon: A defect system for optoelectronic integrated circuits”, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-, 1995, pp. 585-589.
G. J. Norga, Black, M. R., Black, K. A., MSAAD, H., Michel, J., and Kimerling, L. C., “High sensitivity detection of silicon surface reactions by photoconductance decay”, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-, 1995, pp. 1531-1536.
J. Michel, Black, M. R., NORGA, G. J., Black, K. A., MSAAD, H., and Kimerling, L. C., In-situ wafer contamination detection through RF-PCD measurements, vol. 2638. 1995.

1994

B. Zheng, Michel, J., REN, F. Y. G., Kimerling, L. C., JACOBSON, D. C., and POATE, J. M., “ROOM-TEMPERATURE SHARP LINE ELECTROLUMINESCENCE AT LAMBDA=1.54-MU-M FROM”, Applied Physics Letters, vol. 64. pp. 2842-2844, 1994.
H. MSAAD, Michel, J., LAPPE, J. J., and Kimerling, L. C., “ELECTRONIC PASSIVATION OF SILICON SURFACES BY HALOGENS”, Journal of Electronic Materials, vol. 23. pp. 487-491, 1994.
F. Y. G. REN, Michel, J., JACOBSON, D. C., POATE, J. M., and Kimerling, L. C., “FLUORINE-ENHANCED SI-ER LIGHT-EMISSION”, in Materials Synthesis and Processing Using Ion Beams, vol. 316, 1994, pp. 493-498.
J. Michel, REN, F. Y. G., Zheng, B., JACOBSON, D. C., POATE, J. M., and Kimerling, L. C., “THE PHYSICS AND APPLICATION OF SIER FOR LIGHT-EMITTING-DIODES”, in Proceedings of the 17th International Conference on Defects in Semiconductors, Pts 1-3: Icds-17, vol. 143-, 1994, pp. 707-713.
H. MSAAD, NORGA, G. J., Michel, J., and Kimerling, L. C., “DEFECT MONITORING AND CONTROL FOR CRYSTALLINE SILICON PROCESSING”, in 12th Nrel Photovoltaic Program Review, 1994, pp. 471-477.

1992

J. Michel, Fitzgerald, E. A., XIE, Y. H., SILVERMAN, P. J., Morse, M., and Kimerling, L. C., “PHOTOLUMINESCENCE INVESTIGATIONS OF GRADED, TOTALLY RELAXED GEXSI1-X STRUCTURES”, Journal of Electronic Materials, vol. 21. pp. 1099-1104, 1992.
J. L. BENTON, WEIR, B. E., EAGLESHAM, D. J., GOTTSCHO, R. A., Michel, J., and Kimerling, L. C., “MEASUREMENT OF DEFECT PROFILES IN REACTIVE ION ETCHED SILICON”, Journal of Vacuum Science & Technology B, vol. 10. pp. 540-543, 1992.
J. Michel et al., “DOPANT ENHANCEMENT OF THE 1.54 MU-M EMISSION OF ERBIUM IMPLANTED IN SILICON”, in Proceedings of the 16th International Conference on Defects in Semiconductors, Pts 1-3, vol. 83, 1992, pp. 653-658.