Publications

Found 3 results
Filters: Author is Sawin, H. H.  [Clear All Filters]
1997
T. P. Chiang, Sawin, H. H., and Thompson, C. V., Ion-induced chemical vapor deposition of high purity Cu films at room temperature using a microwave discharge H atom beam source, Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, vol. 15, no. 5, pp. 2677 - 2686, 1997.
T. P. Chiang, Sawin, H. H., and Thompson, C. V., Surface kinetic study of ion-induced chemical vapor deposition of copper for focused ion beam applications, Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, vol. 15, no. 6, pp. 3104 - 3114, 1997.