Publications

Found 2 results
Filters: Author is Gross, M. E.  [Clear All Filters]
2001
M. J. Kobrinsky, Thompson, C. V., and Gross, M. E., Diffusional creep in damascene Cu lines, Journal of Applied Physics, vol. 89, no. 1, pp. 91 - 98, 2001.
M. J. Kobrinsky, Gross, M. E., and Thompson, C. V., Mechanical properties of damascene Cu lines during thermal cycling, in Advanced Metallization Conference 2000 (amc 2000), D. Edelstein, Dixit, G., Yasuda, Y., and Ohba, T. 2001, pp. 439 - 445.