Publications

Found 397 results
Filters: Author is Lionel C. Kimerling  [Clear All Filters]
1997
S. H. Ahn, PALM, J., Zheng, B., Duan, X., Agarwal, A. M., Nelson, S. F., Michel, J., and Kimerling, L. C., Electrical study of crystalline silicon coimplanted with erbium and oxygen, vol. 3007. 1997.
J. Michel, PALM, J., Chen, T., Duan, X., Ouellette, E., Ahn, S. H., Nelson, S. F., and Kimerling, L. C., Energy transfer processes at erbium ions in silicon, in Defects in Semiconductors - Icds-19, Pts 1-3, vol. 258-2, G. Davies and Nazare, M. H. 1997, pp. 1485 - 1489.
S. H. Ahn, Zhao, S., Smith, A. L., Chalfoun, L. L., Platero, M., Nakashima, H., and Kimerling, L. C., Gettering of Fe by aluminum in p-type Cz silicon, in Defects in Electronic Materials Ii, vol. 442, J. Michel, Kennedy, T., Wada, K., and Thonke, K. 1997, pp. 169 - 174.
J. Michel, Reddy, A. J., Norga, G. J., Platero, M., and Kimerling, L. C., In-situ determination of Si wafer contamination using photoconductance decay measurements, vol. 97. 1997.
A. J. Reddy, Norga, G. J., Park, A. S., Smith, A. L., Michel, J., Kimerling, L. C., Parekh, B., Shyu, J. H., and Deane, E., In-situ monitoring of HF reprocessing in an industrial scale recirculator bath, in Environmental, Safety, and Health Issues in Ic Production, vol. 447, R. Reif, Heyns, M., Bowling, A., and Tonti, A. 1997, pp. 3 - 8.
S. Zhao, Agarwal, A. M., Benton, J. L., Gilmer, G. H., and Kimerling, L. C., Interstitial defect reactions in silicon, in Defects in Electronic Materials Ii, vol. 442, J. Michel, Kennedy, T., Wada, K., and Thonke, K. 1997, pp. 231 - 236.
S. Zhao, Smith, A. L., Ahn, S. H., Norga, G. J., Platero, M. T., Nakashima, H., Assali, L. V. C., Michel, J., and Kimerling, L. C., Iron in p-type silicon: A comprehensive model, in Defects in Semiconductors - Icds-19, Pts 1-3, vol. 258-2, G. Davies and Nazare, M. H. 1997, pp. 429 - 436.
L. C. Kimerling, Kolenbrander, K. D., Michel, J., and PALM, J., Light emission from silicon, in Solid State Physics - Advances in Research and Applications, Vol 50, vol. 50, H. Ehrenreich and Spaepen, F. 1997, pp. 333 - 381.
G. J. Norga, Platero, M., Black, K. A., Reddy, A. J., Michel, J., and Kimerling, L. C., Mechanism of copper deposition on silicon from dilute hydrofluoric acid solution, Journal of the Electrochemical Society, vol. 144, no. 8, pp. 2801 - 2810, 1997.
J. S. Foresi, Villeneuve, P. R., Ferrera, J., Thoen, E. R., Steinmeyer, G., Fan, S., Joannopoulos, J. D., Kimerling, L. C., Smith, H. I., and Ippen, E. P., Photonic-bandgap microcavities in optical waveguides, Nature, vol. 390, no. 6656, pp. 143 - 145, 1997.
L. M. Giovane, Liao, L., Lim, D. R., Agarwal, A. M., Fitzgerald, E. A., and Kimerling, L. C., Si0.5Ge0.5 relaxed buffer photodetectors and low-loss polycrystalline silicon waveguides for integrated optical interconnects at lambda=1.3 mu m, vol. 3007. 1997.
L. C. Kimerling, Silicon for photonics, vol. 3002. 1997.
A. J. Reddy, Burr, T. A., Chan, J. K., Norga, G. J., Michel, J., and Kimerling, L. C., Silicon surface defects: The roles of passivation and surface contamination, in Defects in Semiconductors - Icds-19, Pts 1-3, vol. 258-2, G. Davies and Nazare, M. H. 1997, pp. 1719 - 1724.
J. S. Foresi, Lim, D. R., Liao, L., Agarwal, A. M., Kimerling, L. C., Tavassoli, M., Cox, M., Cao, M., and Greene, W., Small radius bends and large angle splitters in SOI waveguides, vol. 3007. 1997.
1996
J. PALM, Gan, F., Zheng, B., Michel, J., and Kimerling, L. C., Electroluminescence of erbium-doped silicon, Physical Review B, vol. 54, no. 24, pp. 17603 - 17615, 1996.
J. Michel, Zheng, B., PALM, J., Ouellette, E., Gan, F., and Kimerling, L. C., Erbium doped silicon for light emitting devices, in Rare Earth Doped Semiconductors Ii, vol. 422, S. Coffa, Polman, A., and Schwartz, R. N. 1996, pp. 317 - 324.
L. Chalfoun, Norga, G., Zhao, S., and Kimerling, L. C., In-line materials quality monitor for crystalline silicon solar cell fabrication, in 13th Nrel Photovoltaics Program Review, H. S. Ullal and Witt, C. E. 1996, pp. 535 - 544.
J. S. Foresi, Black, M. R., Agarwal, A. M., and Kimerling, L. C., Losses in polycrystalline silicon waveguides, Applied Physics Letters, vol. 68, no. 15, pp. 2052 - 2054, 1996.
A. M. Agarwal, Liao, L., Foresi, J. S., Black, M. R., Duan, X. M., and Kimerling, L. C., Low-loss polycrystalline silicon waveguides for silicon photonics, Journal of Applied Physics, vol. 80, no. 11, pp. 6120 - 6123, 1996.
L. C. Kimerling, Michel, J., MSAAD, H., and Norga, G. J., Microdefect analysis of silicon: Tools and strategies. 1996.
J. PALM, Gan, F., and Kimerling, L. C., Nonradiative energy back transfer from erbium in silicon by impurity Auger process, vol. 2706. 1996.
A. M. Agarwal, Black, M. R., Foresi, J. S., Liao, L., Liu, Y. P., and Kimerling, L. C., Polysilicon waveguides for silicon photonics, in Polycrystalline Thin Films: Structure, Texture, Properties, and Applications Ii, vol. 403, H. J. Frost, Parker, M. A., Ross, C. A., and Holm, E. A. 1996, pp. 327 - 332.
M. Morse, Zheng, B., PALM, J., Duan, X., and Kimerling, L. C., Properties of ion implanted and UHV-CVD grown Si:Er, in Rare Earth Doped Semiconductors Ii, vol. 422, S. Coffa, Polman, A., and Schwartz, R. N. 1996, pp. 41 - 46.
A. Thilderkvist, Michel, J., Ngiam, S. T., Kimerling, L. C., and Kolenbrander, K. D., Room temperature emission from erbium nanoparticles embedded in a silicon matrix, in Surface/Interface and Stress Effects in Electronic Materials Nanostructures, vol. 405, S. M. Prokes, Cammarata, R. C., Wang, K. L., and Christou, A. 1996, pp. 265 - 270.
1995
J. PALM and Kimerling, L. C., Defects and future silicon technology, in Defect and Impurity Engineered Semiconductors and Devices, vol. 378, S. Ashok, Chevallier, J., Akasaki, I., Johnson, N. M., and Sopori, B. L. 1995, pp. 703 - 711.

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