Publications

Found 373 results
Filters: Author is Lionel C. Kimerling  [Clear All Filters]
1995
J. PALM and Kimerling, L. C., Defects and future silicon technology, in Defect and Impurity Engineered Semiconductors and Devices, vol. 378, S. Ashok, Chevallier, J., Akasaki, I., Johnson, N. M., and Sopori, B. L. 1995, pp. 703 - 711.
F. Gan, Assali, L. V. C., and Kimerling, L. C., Electronic structure of erbium centers in silicon, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-, M. Suezawa and KatayamaYoshida, H. 1995, pp. 579 - 583.
J. Michel, PALM, J., Gan, F., Ren, F. Y. G., Zheng, B., Dunham, S. T., and Kimerling, L. C., Erbium in silicon: A defect system for optoelectronic integrated circuits, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-, M. Suezawa and KatayamaYoshida, H. 1995, pp. 585 - 589.
G. J. Norga, Black, M. R., Black, K. A., MSAAD, H., Michel, J., and Kimerling, L. C., High sensitivity detection of silicon surface reactions by photoconductance decay, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-, M. Suezawa and KatayamaYoshida, H. 1995, pp. 1531 - 1536.
J. Michel, BLACK, M. R., NORGA, G. J., BLACK, K. A., MSAAD, H., and Kimerling, L. C., In-situ wafer contamination detection through RF-PCD measurements, vol. 2638. 1995.
G. J. NORGA and Kimerling, L. C., METAL REMOVAL FROM SILICON SURFACES IN WET CHEMICAL-SYSTEMS, Journal of Electronic Materials, vol. 24, no. 4, pp. 397 - 404, 1995.
H. MSAAD, Michel, J., REDDY, A., and Kimerling, L. C., MONITORING AND OPTIMIZATION OF SILICON SURFACE QUALITY, Journal of the Electrochemical Society, vol. 142, no. 8, pp. 2833 - 2835, 1995.
K. Wada, Nakanishi, H., and Kimerling, L. C., Reactivation of Si donors and Zn acceptors in plasma-irradiated GaAs by reverse BiAs annealing, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-2, M. Suezawa and KatayamaYoshida, H. 1995, pp. 1401 - 1405.
G. J. NORGA, BLACK, K. A., MSAAD, H., Michel, J., and Kimerling, L. C., SIMULATION AND IN-SITU MONITORING OF METALLIC CONTAMINATION AND SURFACE ROUGHENING IN WET WAFER CLEANING SOLUTIONS, Materials Science and Technology, vol. 11, no. 1, pp. 90 - 93, 1995.
S. Zhao, Assali, L. V. C., and Kimerling, L. C., The structure and bonding of iron-acceptor pairs in silicon, in Icds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4, vol. 196-, M. Suezawa and KatayamaYoshida, H. 1995, pp. 1333 - 1337.
1994
H. MSAAD, NORGA, G. J., Michel, J., and Kimerling, L. C., DEFECT MONITORING AND CONTROL FOR CRYSTALLINE SILICON PROCESSING, in 12th Nrel Photovoltaic Program Review, R. Noufi and Ullal, H. S. 1994, pp. 471 - 477.
H. MSAAD, Michel, J., LAPPE, J. J., and Kimerling, L. C., ELECTRONIC PASSIVATION OF SILICON SURFACES BY HALOGENS, Journal of Electronic Materials, vol. 23, no. 5, pp. 487 - 491, 1994.
F. Y. G. REN, Michel, J., JACOBSON, D. C., POATE, J. M., and Kimerling, L. C., FLUORINE-ENHANCED SI-ER LIGHT-EMISSION, in Materials Synthesis and Processing Using Ion Beams, vol. 316, R. J. Culbertson, Holland, O. W., Jones, K. S., and Maex, K. 1994, pp. 493 - 498.
J. Michel, REN, F. Y. G., Zheng, B., JACOBSON, D. C., POATE, J. M., and Kimerling, L. C., THE PHYSICS AND APPLICATION OF SIER FOR LIGHT-EMITTING-DIODES, in Proceedings of the 17th International Conference on Defects in Semiconductors, Pts 1-3: Icds-17, vol. 143-, H. Heinrich and Jantsch, W. 1994, pp. 707 - 713.
B. Zheng, Michel, J., REN, F. Y. G., Kimerling, L. C., JACOBSON, D. C., and POATE, J. M., ROOM-TEMPERATURE SHARP LINE ELECTROLUMINESCENCE AT LAMBDA=1.54-MU-M FROM, Applied Physics Letters, vol. 64, no. 21, pp. 2842 - 2844, 1994.
1993
I. N. YASSIEVICH and Kimerling, L. C., THE MECHANISMS OF ELECTRONIC EXCITATION OF RARE-EARTH IMPURITIES IN SEMICONDUCTORS, Semiconductor Science and Technology, vol. 8, no. 5, pp. 718 - 727, 1993.
A. ROHATGI, WEBER, E. R., and Kimerling, L. C., OPPORTUNITIES IN SILICON PHOTOVOLTAICS AND DEFECT CONTROL IN PHOTOVOLTAIC MATERIALS, Journal of Electronic Materials, vol. 22, no. 1, pp. 65 - 72, 1993.
1991
L. C. Kimerling, DEFECT ENGINEERING, Mrs Bulletin, vol. 16, no. 12, pp. 42 - 47, 1991.
1975
L. C. Kimerling, DEANGELIS, H. M., and DIEBOLD, J. W., ROLE OF DEFECT CHARGE STATE IN STABILITY OF POINT-DEFECTS IN SILICON, Solid State Communications, vol. 16, no. 1, pp. 171 - 174, 1975.

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