Publications
Found 2 results
Filters: Author is Tan, C. S. [Clear All Filters]
“Comparison between chemical vapor deposited and physical vapor deposited WSi2 metal gate for InGaAs n-metal-oxide-semiconductor field-effect transistors”, Applied Physics Letters, vol. 98, no. 18, 2011.
, “Effect of Using Chemical Vapor Deposition WSi2 and Postmetallization Annealing on GaAs Metal-Oxide-Semiconductor Capacitors”, Electrochemical and Solid State Letters, vol. 13, no. 9, pp. II328 - II331, 2010.
,