Publications

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2007
L. R. Arana, de Mas, N., Schmidt, R., Franz, A. J., Schmidt, M. A., and Jensen, K. F., Isotropic etching of silicon in fluorine gas for MEMS micromachining, Journal of Micromechanics and Microengineering, vol. 17, no. 2, pp. 384 - 392, 2007.