Publications

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Filters: Author is de Mas, Nuria  [Clear All Filters]
2007
L. R. Arana, de Mas, N., Schmidt, R., Franz, A. J., Schmidt, M. A., and Jensen, K. F., Isotropic etching of silicon in fluorine gas for MEMS micromachining, Journal of Micromechanics and Microengineering, vol. 17, no. 2, pp. 384 - 392, 2007.