Void dynamics in copper-based interconnects

TitleVoid dynamics in copper-based interconnects
Publication TypeJournal Article
Year of Publication2011
AuthorsChoi, Z-S, Lee, J, Lim, MKeong, Gan, CLip, Thompson, CV
JournalJournal of Applied Physics
Volume110
Issue3
Date Published2011/08/01/
ISBN Number0021-8979