Use of scanned laser annealing to control the bamboo grain length of Cu interconnects

TitleUse of scanned laser annealing to control the bamboo grain length of Cu interconnects
Publication TypeJournal Article
Year of Publication2000
AuthorsHau-Riege, CS, Thompson, CV
JournalApplied Physics Letters
Volume77
Issue3
Pagination352 - 354
Date Published2000/07/17/
ISBN Number0003-6951