Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer

TitleTransparent amorphous silicon channel waveguides with silicon nitride intercladding layer
Publication TypeJournal Article
Year of Publication2009
AuthorsSun, R, McComber, K, Cheng, J, Sparacin, DK, Beals, M, Michel, J, Kimerling, LC
JournalApplied Physics Letters
Volume94
Issue14
Date Published2009/04/06/
ISBN Number0003-6951