Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process

TitleTransparent amorphous silicon channel waveguides and high-Q resonators using a damascene process
Publication TypeJournal Article
Year of Publication2009
AuthorsSun, R, Cheng, J, Michel, J, Kimerling, LC
JournalOptics Letters
Volume34
Issue15
Pagination2378 - 2380
Date Published2009/08/01/
ISBN Number0146-9592