Theoretical modeling on hydrogen evolution in ultraviolet light-treated hydrogenated silicon nitride

TitleTheoretical modeling on hydrogen evolution in ultraviolet light-treated hydrogenated silicon nitride
Publication TypeJournal Article
Year of Publication2008
AuthorsSun, R, Wang, L, Cheng, J, Michel, J, Kimerling, LC, Balseanu, M, Xia, L-Q, M'saad, H
JournalJournal of Applied Physics
Volume104
Issue9
Date Published2008/11/01/
ISBN Number0021-8979