Tensile stress evolution during deposition of Volmer-Weber thin films

TitleTensile stress evolution during deposition of Volmer-Weber thin films
Publication TypeJournal Article
Year of Publication2000
AuthorsSeel, SC, Thompson, CV, Hearne, SJ, Floro, JA
JournalJournal of Applied Physics
Volume88
Issue12
Pagination7079 - 7088
Date Published2000/12/15/
ISBN Number0021-8979