Surface smoothing of polycrystalline Si waveguides with gas-cluster ion beams

TitleSurface smoothing of polycrystalline Si waveguides with gas-cluster ion beams
Publication TypeBook Chapter
Year of Publication2000
AuthorsToyoda, N, Lee, KK, Luan, HC, Lim, DR, Agarwal, AM, Wada, K, Kimerling, LC, Allen, LP, Fenner, DB, Kirkpatrick, AR
EditorNASHIMOTO, K, Pachter, R, Wessels, BW, Shmulovich, J, Jen, AKY, Lewis, K, Sutherland, R, Perry, JW
Book TitleThin Films for Optical Waveguide Devices and Materials for Optical Limiting
Volume597
Pagination51 - 55
ISBN Number1-55899-505-6