SURFACE-ENERGY-DRIVEN SECONDARY GRAIN-GROWTH IN ULTRATHIN (LESS-THAN-100 NM) FILMS OF SILICON

TitleSURFACE-ENERGY-DRIVEN SECONDARY GRAIN-GROWTH IN ULTRATHIN (LESS-THAN-100 NM) FILMS OF SILICON
Publication TypeJournal Article
Year of Publication1984
AuthorsThompson, CV, SMITH, HI
JournalApplied Physics Letters
Volume44
Issue6
Pagination603 - 605
Date Published1984///
ISBN Number0003-6951