SURFACE-ENERGY-DRIVEN GRAIN-GROWTH DURING RAPID THERMAL ANNEALING (LESS THAN 10 S) OF THIN SILICON FILMS

TitleSURFACE-ENERGY-DRIVEN GRAIN-GROWTH DURING RAPID THERMAL ANNEALING (LESS THAN 10 S) OF THIN SILICON FILMS
Publication TypeJournal Article
Year of Publication1987
AuthorsGARRISON, SM, CAMMARATA, RC, Thompson, CV, SMITH, HI
JournalJournal of Applied Physics
Volume61
Issue4
Pagination1652 - 1655
Date Published1987/02/15/
ISBN Number0021-8979