Structural analysis of metalorganic chemical vapor deposited AlN nucleation layers on Si(111)

TitleStructural analysis of metalorganic chemical vapor deposited AlN nucleation layers on Si(111)
Publication TypeJournal Article
Year of Publication2004
AuthorsZang, KY, Wang, LS, Chua, SJ, Thompson, CV
JournalJournal of Crystal Growth
Volume268
Issue3-4
Pagination515 - 520
Date Published2004/08/01/
ISBN Number0022-0248