Simulation of microstructural evolution induced by scanned laser annealing of metallic interconnects

TitleSimulation of microstructural evolution induced by scanned laser annealing of metallic interconnects
Publication TypeJournal Article
Year of Publication2001
AuthorsHau-Riege, CS, Hau-Riege, SP, Thompson, CV
JournalJournal of Electronic Materials
Volume30
Issue1
Pagination11 - 16
Date Published2001/01//
ISBN Number0361-5235