SIMULATION AND IN-SITU MONITORING OF METALLIC CONTAMINATION AND SURFACE ROUGHENING IN WET WAFER CLEANING SOLUTIONS

TitleSIMULATION AND IN-SITU MONITORING OF METALLIC CONTAMINATION AND SURFACE ROUGHENING IN WET WAFER CLEANING SOLUTIONS
Publication TypeJournal Article
Year of Publication1995
AuthorsNORGA, GJ, BLACK, KA, MSAAD, H, Michel, J, Kimerling, LC
JournalMaterials Science and Technology
Volume11
Issue1
Pagination90 - 93
Date Published1995/01//
ISBN Number0267-0836