SILICON-ON-INSULATOR BY GRAPHOEPITAXY AND ZONE-MELTING RECRYSTALLIZATION

TitleSILICON-ON-INSULATOR BY GRAPHOEPITAXY AND ZONE-MELTING RECRYSTALLIZATION
Publication TypeJournal Article
Year of Publication1983
AuthorsSMITH, HI, GEIS, MW, Thompson, CV, ATWATER, HA
JournalJournal of Crystal Growth
Volume63
Issue3
Pagination527 - 546
Date Published1983///
ISBN Number0022-0248