SiGe-on-SOI Mach-Zehnder Modulators Enabling Large Mode Size Edge Coupling

TitleSiGe-on-SOI Mach-Zehnder Modulators Enabling Large Mode Size Edge Coupling
Publication TypeBook Chapter
Year of Publication2016
AuthorsSun, X, Li, F, Shao, Z, Guo, W, Huang, Y, Liu, F, Jia, L, Feng, N, Hu, J
Book Title2016 Ieee 13th International Conference on Group Iv Photonics (gfp)
Pagination42 - 43
PublisherIeee
CityNew York
ISBN Number978-1-5090-1903-8
Keywordsintegrated photonics, Modulators, Si Photonics
Abstract

A SiGe-on-SOI carrier-depletion Mach-Zehnder modulator is presented. Compared with Si modulators, it eliminates advanced lithography by enabling a dual-waveguide design using small SiGe waveguides for modulators and large Si waveguides for edge coupling. DC and high speed test results are included.