A SiGe-on-SOI Mach-Zehnder Modulator Enabling Easy Edge Coupling

TitleA SiGe-on-SOI Mach-Zehnder Modulator Enabling Easy Edge Coupling
Publication TypeBook
Year of Publication2016
AuthorsSun, X, Li, F, Shao, Z, Guo, W, Huang, Y, Liu, F, Jia, L, Feng, N, Hu, J
PublisherIeee
CityNew York
ISBN Number978-1-5090-1900-7
Keywordsintegrated photonics, Modulators, Si Photonics
Abstract

A SiGe-on-SOI carrier-depletion Mach-Zehnder modulator is presented. Compared with Si modulators, it enables a dual-waveguide design using small SiGe waveguides for modulators and large Si waveguides for edge coupling thus eliminates advanced lithography for inverse tapers. DC and high speed test results are included.