SiC-on-insulator on-chip photonic sensor in a radiative environment

TitleSiC-on-insulator on-chip photonic sensor in a radiative environment
Publication TypeBook Chapter
Year of Publication2016
AuthorsMa, D, Han, Z, Du, Q, Hu, J, Kimerling, L, Agarwal, A, Tan, DTH
Book Title2016 Ieee Sensors
PublisherIeee
CityNew York
ISBN Number978-1-4799-8287-5
Keywordschemical sensors, fabrication, gamma irradiation, hostile environments, optical microresonator, photonics, silicon carbide
Abstract

Silicon carbide has a high refractive index, a large band gap, CMOS compatibility, and excellent chemical, mechanical, and thermal properties, thus making it an ideal material for on-chip photonic sensors in hostile environments. We discuss the design, fabrication, and evaluation of a SiC-on-insulator photonic device for chemical sensing as well as the gamma-ray radiation effects on device performance and sensitivity. The SiC-on-insulator device demonstrates a quality factor of 18,000 at near IR wavelengths and maintains the high quality factor even after a high dose of gamma irradiation. The effect of gamma irradiation on N-methyaniline chemical sensitivity of the SiC-on-insulator sensor is studied.