|Title||Self-assembly: sacrificial-post templating method for block copolymer self-assembly (small 3/2014).|
|Publication Type||Journal Article|
|Year of Publication||2014|
|Authors||G, ATavakkoli, Nicaise, SM, Hannon, AF, Gotrik, KW, Alexander-Katz, A, Ross, CA, Berggren, KK|
|Journal||Small (Weinheim an der Bergstrasse, Germany)|
|Pagination||418 - 418|
Block copolymer (BCP) thin films self-assemble to form nanoscale patterns, as K. K. Berggren and co-workers report on page 493. On a smooth substrate, the polystyrene-block-poly(dimethylsiloxane) copolymer forms randomly oriented inplane cylinders with a 35-nm period (images on the left). A set of sacrifical nanoposts made of poly(methyl methacrylate) directed the self-assembly to form (center top to bottom): square arrays of spheres or holes, and square and hexagonal meshes with bimodal hole-size distributions. The posts and the polystyrene are removed by etching and the final pattern consists of oxidized poly(dimethylsiloxane).