Selenium Segregation in Femtosecond-Laser Hyperdoped Silicon Revealed by Electron Tomography

TitleSelenium Segregation in Femtosecond-Laser Hyperdoped Silicon Revealed by Electron Tomography
Publication TypeJournal Article
Year of Publication2013
AuthorsHaberfehlner, G, Smith, MJ, Idrobo, J-C, Auvert, G, Sher, M-J, Winkler, MT, Mazur, E, Gambacorti, N, Gradecak, S, Bleuet, P
JournalMicroscopy and Microanalysis
Volume19
Issue3
Pagination716 - 725
Date Published2013/06//
ISBN Number1431-9276