Piezoresistive microcantilevers for in situ stress measurements during thin film deposition

TitlePiezoresistive microcantilevers for in situ stress measurements during thin film deposition
Publication TypeJournal Article
Year of Publication2005
AuthorsSeel, SC, Thompson, CV
JournalReview of Scientific Instruments
Volume76
Issue7
Date Published2005/07//
ISBN Number0034-6748