Oxygen and Erbium related donor centers in Czochralski grown silicon implanted with erbium

TitleOxygen and Erbium related donor centers in Czochralski grown silicon implanted with erbium
Publication TypeJournal Article
Year of Publication1999
AuthorsEmtsev, VV, Emtsev, VV, Poloskin, DS, Shek, EI, Sobolev, NA, Michel, J, Kimerling, LC
JournalSemiconductors
Volume33
Issue10
Pagination1084 - 1087
Date Published1999/10//
ISBN Number1063-7826