Optical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength

TitleOptical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength
Publication TypeJournal Article
Year of Publication2000
AuthorsLiao, L, Lim, DR, Agarwal, AM, Duan, XM, Lee, KK, Kimerling, LC
JournalJournal of Electronic Materials
Volume29
Issue12
Pagination1380 - 1386
Date Published2000/12//
ISBN Number0361-5235