For an open focused thematic special issue of Microelectronic Engineering Micro/Nano Fabrication 2014, Short title: Nano Fab 2014 also including selected papers from the 40th Micro and Nano Engineering conference MNE 2014 Preface

TitleFor an open focused thematic special issue of Microelectronic Engineering Micro/Nano Fabrication 2014, Short title: Nano Fab 2014 also including selected papers from the 40th Micro and Nano Engineering conference MNE 2014 Preface
Publication TypeJournal Article
Year of Publication2015
AuthorsSchift, H, Rupp, JLM
JournalMicroelectronic Engineering
Volume141
PaginationVIII - IX
Date Published2015/06/15/