NISI2 PRECIPITATION IN NICKEL-IMPLANTED SILICON FILMS

TitleNISI2 PRECIPITATION IN NICKEL-IMPLANTED SILICON FILMS
Publication TypeJournal Article
Year of Publication1987
AuthorsCAMMARATA, RC, Thompson, CV, TU, KN
JournalApplied Physics Letters
Volume51
Issue14
Pagination1106 - 1108
Date Published1987/10/05/
ISBN Number0003-6951