Nested potassium hydroxide etching and protective coatings for silicon-based microreactors

TitleNested potassium hydroxide etching and protective coatings for silicon-based microreactors
Publication TypeJournal Article
Year of Publication2014
Authorsde Mas, N, Schmidt, MA, Jensen, KF
JournalJournal of Micromechanics and Microengineering
Volume24
Issue3
Date Published2014/03//
ISBN Number0960-1317