Modeling of transition metal redistribution to enable wafer design for gettering

TitleModeling of transition metal redistribution to enable wafer design for gettering
Publication TypeJournal Article
Year of Publication2000
AuthorsSmith, AL, Wada, K, Kimerling, LC
JournalJournal of the Electrochemical Society
Volume147
Issue3
Pagination1154 - 1160
Date Published2000/03//
ISBN Number0013-4651