Modeling of texture evolution in copper interconnects annealed in trenches

TitleModeling of texture evolution in copper interconnects annealed in trenches
Publication TypeJournal Article
Year of Publication1999
AuthorsRiege, SP, Thompson, CV
JournalScripta Materialia
Volume41
Issue4
Pagination403 - 408
Date Published1999/07/23/
ISBN Number1359-6462