Microstructural evolution induced by scanned laser annealing in Al interconnects

TitleMicrostructural evolution induced by scanned laser annealing in Al interconnects
Publication TypeJournal Article
Year of Publication1999
AuthorsHau-Riege, CS, Thompson, CV
JournalApplied Physics Letters
Volume75
Issue10
Pagination1464 - 1466
Date Published1999/09/06/
ISBN Number0003-6951