Metal-Catalyzed Etching of Vertically Aligned Polysilicon and Amorphous Silicon Nanowire Arrays by Etching Direction Confinement

TitleMetal-Catalyzed Etching of Vertically Aligned Polysilicon and Amorphous Silicon Nanowire Arrays by Etching Direction Confinement
Publication TypeJournal Article
Year of Publication2010
AuthorsChang, S-W, Chuang, VP, Boles, ST, Thompson, CV
JournalAdvanced Functional Materials
Volume20
Issue24
Pagination4364 - 4370
Date Published2010/12/21/
ISBN Number1616-301X