Mechanism of copper deposition on silicon from dilute hydrofluoric acid solution

TitleMechanism of copper deposition on silicon from dilute hydrofluoric acid solution
Publication TypeJournal Article
Year of Publication1997
AuthorsNorga, GJ, Platero, M, Black, KA, Reddy, AJ, Michel, J, Kimerling, LC
JournalJournal of the Electrochemical Society
Volume144
Issue8
Pagination2801 - 2810
Date Published1997/08//
ISBN Number0013-4651