LOW-TEMPERATURE ION-BEAM ENHANCED GRAIN-GROWTH IN THIN-FILMS

TitleLOW-TEMPERATURE ION-BEAM ENHANCED GRAIN-GROWTH IN THIN-FILMS
Publication TypeJournal Article
Year of Publication1987
AuthorsATWATER, HA, SMITH, HI, Thompson, CV
JournalJournal of Electronic Materials
Volume16
Issue4
PaginationA7 - A7
Date Published1987/07//
ISBN Number0361-5235