Low-temperature germanium ultra-high vacuum chemical vapor deposition for back-end photonic device integration

TitleLow-temperature germanium ultra-high vacuum chemical vapor deposition for back-end photonic device integration
Publication TypeJournal Article
Year of Publication2010
AuthorsMcComber, KA, Liu, J, Michel, J, Kimerling, LC
Journal2010 7th Ieee International Conference on Group Iv Photonics (gfp)
Pagination57 - 59
Date Published2010///
ISBN Number1949-2081