Low-Stress Silicon Nitride Platform for Mid-Infrared Broadband and Monolithically Integrated Microphotonics

TitleLow-Stress Silicon Nitride Platform for Mid-Infrared Broadband and Monolithically Integrated Microphotonics
Publication TypeJournal Article
Year of Publication2013
AuthorsLin, PTai, Singh, V, Lin, H-YGreg, Tiwald, T, Kimerling, LC, Agarwal, AM
JournalAdvanced Optical Materials
Volume1
Issue10
Pagination732 - 739
Date Published2013/10//
ISBN Number2195-1071