Low-loss aluminium nitride thin film for mid-infrared microphotonics

TitleLow-loss aluminium nitride thin film for mid-infrared microphotonics
Publication TypeJournal Article
Year of Publication2014
AuthorsLin, PTai, Jung, H, Kimerling, LC, Agarwal, AM, Tang, HX
JournalLaser & Photonics Reviews
Volume8
Issue2
PaginationL23 - L28
Date Published2014/03//
ISBN Number1863-8880