Low frequency and microwave performances of Ba0.6Sr0.4TiO3 films on atomic layer deposited TiO2/high resistivity Si substrates

TitleLow frequency and microwave performances of Ba0.6Sr0.4TiO3 films on atomic layer deposited TiO2/high resistivity Si substrates
Publication TypeJournal Article
Year of Publication2006
AuthorsKim, H-S, Kim, I-D, Kim, K-B, Yun, T-S, Lee, J-C, Tuller, HL, Choi, W-Y, Kim, H-G
JournalJournal of Electroceramics
Volume17
Issue2-4
Pagination421 - 425
Date Published2006/12//
ISBN Number1385-3449