Irradiation of on-chip chalcogenide glass waveguide mid-infrared gas sensor

TitleIrradiation of on-chip chalcogenide glass waveguide mid-infrared gas sensor
Publication TypeBook Chapter
Year of Publication2016
AuthorsSu, P, Han, Z, Kita, D, Singh, V, Du, Q, Kimerling, LC, Hu, J, Agarwal, A, Lin, PTai, Richardson, K, Tan, DTH
Book Title2016 Ieee Sensors
PublisherIeee
CityNew York
ISBN Number978-1-4799-8287-5
Keywordschalcogenide glass, gas detection, gas sensor, integrated photonics, radiation, spectroscopy
Abstract

We measure the effect of radiation damage on an on-chip mid-infrared methane gas sensor made using a spiral chalcogenide glass waveguide. The sensor is fabricated using UV lithography and a lift-off process after deposition of chalcogenide glass using a thermal evaporator. We measure the transmittance change of the sensor at varying concentrations of methane after varying doses of irradiation.