Ion-induced chemical vapor deposition of copper films with nanocellular microstructures

TitleIon-induced chemical vapor deposition of copper films with nanocellular microstructures
Publication TypeJournal Article
Year of Publication2003
AuthorsRoss, F, Thompson, CV, Chiang, T, Sawin, HH
JournalApplied Physics Letters
Volume83
Issue6
Pagination1225 - 1227
Date Published2003/08/11/
ISBN Number0003-6951