High sensitivity detection of silicon surface reactions by photoconductance decay

TitleHigh sensitivity detection of silicon surface reactions by photoconductance decay
Publication TypeBook Chapter
Year of Publication1995
AuthorsNorga, GJ, Black, MR, Black, KA, MSAAD, H, Michel, J, Kimerling, LC
EditorSuezawa, M, KatayamaYoshida, H
Book TitleIcds-18 - Proceedings of the 18th International Conference on Defects in Semiconductors, Pts 1-4
Volume196-
Pagination1531 - 1536
ISBN Number0-87849-716-1